An X-ray photoelectron spectroscopy study of carbon nitride films grown by low energy ion implantation

Surface and Coatings Technology

Volumn 83, Issue 1-3, 1996, Pages 103-108

  Galan L ^a   Montero, I ^a   Rueda, F ^a  

^a INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

Author keywords

Carbon nitride films; Low energy ion implantation; XPS

Indexed keywords

AMORPHOUS MATERIALS; CHEMICAL BONDS; COATINGS; COMPOSITION; COMPOSITION EFFECTS; ELECTRON ENERGY LEVELS; FILM GROWTH; GRAPHITE; HYDROGENATION; NITRIDES; NITROGEN; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON NITRIDE; SURFACE COATINGS;

ION IMPLANTATION;

EID: 0030243013     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/0257-8972(95)02824-2     Document Type: Article

References (27)

1. F. Rossi, B. André, A. van Veen, P.E. Mijnarends, H. Schut, F. Labohm, H. Dunlop, M.P. Delpancke and K. Hubbard, J. Mater. Res., 9 (1994) 2440.
2. G.L. Doll, J.P. Haremans, T.A. Perry and J.V. Mantese, J. Mater. Res., 9 (1994) 85.
3. M. Ricci, M. Trinquecoste, F. Auuguste, R. Canet and P. Delhaes, J. Mater. Res., 8 (1993) 480.
4. M.Y. Chen, X. Lin, V.P. Dravid and Y.W. Chung, Surf. Coat. Technol., 54-55 (1992) 360.
5. J.H. Kaufman, S. Metin and D.D. Saperstein, Phys. Rev. B, 39 (1989) 13053.
6. J.A. Taylor, G.M. Lancaster and J.W. Rabalais, J. Electron Spectrosc. Relat. Phenom., 13 (1978) 435.
7. A.Y. Liu and M.L. Cohen, Science, 245 (1989) 842.
8. P. Prieto, L. Galán and J.M. Sanz, Phys. Rev. B, 47 (1993) 1613.
9. P. Prieto, Ph.D. Thesis, Universidad Autónoma de Madrid, E-28049 Madrid, 1992.
10. A. Woode and J. Petit, ESA J., 14 (1990) 467.
11. L. Galán, Memoria Final (Final Rep.) CICYTESP89-0182, 1992.
12. I. Montero, L. Galán, A. Laurent, J. Perrière and J. Spousta, Thin Solid Films, 228 (1993) 72.
13. J.C. Lascovich, R. Giorgi and S. Scaglione, Appl. Surf. Sci., 65 (1991) 17.
14. J.C. Lascovich and S. Scaglione, Appl. Surf. Sci., 78 (1994) 17.
15. J. Martín, L. Vázquez, P. Bernard, F. Comín and S. Ferrer, Appl. Phys. Lett., 57 (1990) 1742.
16. D. Ugolini, J. Eitle and P. Oelhafen, Vacuum, 41 (1990) 1374.
17. J. Fink, Th.Müller Heinzerling, J. Pflüger, B. Scheerer, B. Discher, P. Koidl, A. Bubenzer and R.E. Sah, Phys. Rev. B, 30 (1984) 4713.
18. R. Kärcher, L. Ley and R.L. Johnson, Phys. Rev. B, 30 (1984) 1896.
19. P. Prieto, L. Galán and J.M. Sanz, Surf. Sci., 251-252 (1995) 701.
20. C.D. Wagner, W.M. Riegs, L.E. Davis and J.F. Moulder, in G.E. Mulienberg (ed.), Handbook of X-ray Photoelectron Spectroscopy, Perkin-Elmer Corporation, Eden Prairie, MN, 1979.
21. R.P. Vazquez, M.H. Hecht, F.J. Grunthaner and M.L. Naiman, Appl. Phys. Lett., 44 (1994) 969.
22. L. Ley, J. Reichardt and R.L. Johnson, Phys. Rev. Lett., 49 (1982) 1664.
23. F.J. Grunthaner and P.J. Grunthaner, Mater. Sci. Rep., 1 (1986) 85.
24. I. Montero, L. Galán, O. Najmi and J.M. Albella, Phys. Rev. B, 50 (1994) 4881.
25. L. Galán, P. Prieto, C. Morant, L. Soriano, J.M. Sanz, E. Elizalde and F. Rueda, Surf. Interface Anal., 19 (1992) 205.
26. D. Briggs, in D. Briggs and M.P. Seah (eds.), Practical Surface Analysis, Vol. 1, Auger and X-ray Photoelectron Spectroscopy, Wiley, New York, 1990, 437.
27. D.A. Shirley, in M. Cardona and L. Ley (eds.), Photoemission in Solids I. General Principles, in Top. Appl. Phys., 26 (1978) 165.