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Journal of Applied Physics

Volumn 79, Issue 9, 1996, Pages 7234-7240

Properties of carbon ion deposited tetrahedral amorphous carbon films as a function of ion energy

(7) Shi, Xu a Tay, B K a Tan, H S a Zhong, Li a Tu, Y Q a Silva, S R P b Milne, W I b

a NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

b UNIVERSITY OF CAMBRIDGE (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0006413423 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.361440 Document Type: Article

Times cited : (342)

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