Growth, doping and applications of cubic boron nitride thin films

Diamond and Related Materials

Volumn 9, Issue 9-10, 2000, Pages 1767-1773

  Ronning, C ^a   Feldermann, H ^a   Hofsass H ^a  

^a UNIVERSITY OF GÖTTINGEN   (Germany)

Author keywords

Cubic boron nitride; Doping; Growth; Ion bombardment; Modeling; Stress

Indexed keywords

DOPING (ADDITIVES); FILM GROWTH; ION BOMBARDMENT; MATHEMATICAL MODELS; NUCLEATION; TEMPERATURE; THIN FILMS;

CYLINDRICAL THERMAL SPIKE MODEL; SUBSTRATE TEMPERATURE;

CUBIC BORON NITRIDE;

BORON NITRIDE; DIAMOND-LIKE COATING; ION BOMBARDMENT; STRESS;

EID: 0034282140     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(00)00299-5     Document Type: Conference Paper

References (45)