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Volumn 151-152, Issue , 2002, Pages 128-132
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Elastic constants of tetrahedral amorphous carbon films: The effect of intrinsic stresses
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Author keywords
Elastic constants; Intrinsic stress; Molecular dynamics; Tetrahedral amorphous carbon
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Indexed keywords
CARBON;
COMPRESSIVE STRESS;
COMPUTER SIMULATION;
DEFORMATION;
ELASTICITY;
EQUATIONS OF MOTION;
HYDROSTATIC PRESSURE;
ION BEAM ASSISTED DEPOSITION;
AMORPHOUS CARBON FILMS;
ELASTIC CONSTANTS;
AMORPHOUS FILMS;
CARBON;
ELASTIC PROPERTY;
FILM;
INORGANIC COATING;
STRESS;
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EID: 0036495297
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(01)01625-5 Document Type: Article |
Times cited : (9)
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References (17)
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