Characterization of carbon nitride films modified by low energy ion-beam bombardment

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 117, Issue 3, 1996, Pages 249-252

  Zhong Min, Ren ^a   Yuan Cheng, Du ^a   Zhi Feng, Ying ^a   Fu Ming, Li ^a   Jing, Lin ^a   Yun Zhu, Ren ^a   Xiang Fu, Zong ^a  

^a FUDAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; CARBON INORGANIC COMPOUNDS; CHARACTERIZATION; CRYSTALS; ELECTRON DIFFRACTION; ION BEAMS; ION BOMBARDMENT; NITRIDES; RAMAN SPECTROSCOPY; SYNTHESIS (CHEMICAL); TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON NITRIDE FILMS; KAUFMAN SOURCE; RAMAN ANALYSES;

THIN FILMS;

EID: 0030245921     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(96)00322-9     Document Type: Article

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