Patterning with Block Copolymers

Unconventional Nanopatterning Techniques and Applications

Volumn , Issue , 2008, Pages 233-289

  Wang, Jia Yu ^a   Chen, Wei ^a   Russell, Thomas P ^a  

^a NONE

Author keywords

Graphoepitaxy process controlling crystal growth orientation; Nanoporous BCP films; Patterning with block copolymers

Indexed keywords

EID: 84891036524     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/9780470405789.ch10     Document Type: Chapter

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