Growth of silicon oxide in thin film block copolymer scaffolds

Advanced Materials

Volumn 16, Issue 8, 2004, Pages 702-706

  Kim, Dong Ha ^a,c   Jia, Xinqiao ^a,d   Lin, Zhiqun ^a,e   Guarini, Kathryn W ^b   Russell, Thomas P ^a  

^a UNIVERSITY OF MASSACHUSETTS   (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

^c MAX PLANCK INSTITUTE FOR POLYMER RESEARCH   (Germany)

^d Massachusetts Institute of Technology Cambridge   (United States)

^e UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COPOLYMERS; CRYSTAL GROWTH; LITHOGRAPHY; MORPHOLOGY; OPTICAL SWITCHES; SELF ASSEMBLY; SILICON WAFERS; THIN FILMS;

COPOLYMER SCAFFOLDS; PHOTONIC DEVICES; SILICON OXIDE;

SILICA;

EID: 2442560462     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/adma.200404906     Document Type: Article

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