Mesoporous Silicates Prepared Using Preorganized Templates in Supercritical Fluids

Science

Volumn 303, Issue 5657, 2004, Pages 507-510

  Pai, Rajaram A ^a   Humayun, Raashina ^b   Schulberg, Michelle T ^b   Sengupta, Archita ^b   Sun, Jia Ning ^b   Watkins, James J ^a  

^a University of Massachusetts   (United States)

^b NOVELLUS SYSTEMS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COPOLYMERS; DEPOSITION; MESOPOROUS MATERIALS; SUPERCRITICAL FLUIDS;

BIOMINERALIZATION;

SILICATES;

CARBON DIOXIDE; COPOLYMER; METAL OXIDE; SILICATE; SILICON DERIVATIVE;

FLUID; SILICATE;

ARTICLE; BIOMINERALIZATION; DEVICE; DIELECTRIC CONSTANT; FILM; INFUSION; PHASE SEPARATION; POLYMERIZATION; PRIORITY JOURNAL; SUPERCRITICAL FLUID;

EID: 1642515887     PISSN: 00368075     EISSN: None     Source Type: Journal    
DOI: 10.1126/science.1092627     Document Type: Article

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31. The approach to mesoporous materials described here was developed at the University of Massachusetts. Postprocessing and adaptation for application to low-dielectric constant films was conducted at Novellus Systems. Supported by the David and Lucile Packard Foundation, NSF, and Novellus Systems. We thank D. Cheatham for SEM analysis and T. Mountsier for CMP testing.