Atomic Layer Deposition on Soft Materials

Atomic Layer Deposition of Nanostructured Materials

Volumn , Issue , 2012, Pages 271-300

  Parsons, Gregory N ^a  

^a North Carolina State University   (United States)

Author keywords

Atomic layer deposition; Molecular layer deposition; Organic inorganic interfaces; Polymers; Self assembled monolayers; Sequential vapor infiltration; Soft materials

Indexed keywords

EID: 84883987773     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/9783527639915.ch12     Document Type: Chapter

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