Chemical effects of methyl and methyl ester groups on the nucleation and growth of vapor-deposited aluminum films

Journal of the American Chemical Society

Volumn 121, Issue 35, 1999, Pages 8052-8064

  Hooper, A ^a   Fisher, G L ^a   Konstadinidis, K ^b   Jung, D ^a,c   Nguyen, H ^a   Opila, R ^b   Collins, R W ^a   Winograd, N ^a   Allara, D L ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

^b LUCENT TECHNOLOGIES   (United States)

^c Cellomics Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ESTER DERIVATIVE; METHYL GROUP;

ARTICLE; CHEMICAL ANALYSIS; CHEMICAL INTERACTION; CHEMICAL STRUCTURE; CONFORMATIONAL TRANSITION; FILM; MOLECULAR DYNAMICS;

EID: 0033536458     PISSN: 00027863     EISSN: None     Source Type: Journal    
DOI: 10.1021/ja9835234     Document Type: Article

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24. Polyimides; (a) Atanasoska, Lj.; Anderson, S. G.; Meyer, H. M., III; Zhangda, L.; Weaver, J. H. J. Vac. Sci. Technol. A 1987, 5, 3325- 3333. (b) Bartha, J. W.; Hahn, P. O.; LeGoues, F.; Ho, P. S. J. Vac. Sci. Technol. A 1985, 3, 1390-1393. (c) Ho, P. S.; Hahn, P. O.; Bartha, J. W.; Rubloff, G. W.; LeGoues, F. K. J. Vac. Sci. Technol. A 1985, 3, 739-745. (d) Pireaux, J. J.; Vermeersch, M.; Grégoire, C.; Thiry, P. A.; Caudano, R. J. Chem. Phys. 1988, 88, 3353-3362. (e) Vasile, M. J.; Bachman, B. J. J. Vac. Sci. Technol. A 1989, 7, 2992-2997. (f) Domingue, A.; Dignard- Bailey, L.; Sacher, E.; Yelon, A.; Ellis, T. H. In Metallization of Polymers; Sacher, E., Kowalczyk, S. P., Pireaux, J.-J., Eds.; ACS Symposium Series 440; American Chemical Society: Washington, DC, 1990; pp 272-287. (g) Selmani, A. In Metallization of Polymers; Sacher, E., Kowalczyk, S. P., Pireaux, J.-J., Eds.; ACS Symposium Series 440; American Chemical Society: Washington, DC, 1990; pp 345-351. Poly(acrylic acid): (h) Dekoven, B. M.; Hagans, P. L. Appl. Surf. Sci. 1986, 27, 199-213. Poly(ethylene terephthalate): Bou, M.; Martin, J. M.; Le Mogne, Th. Appl. Surf. Sci. 1991, 47, 149-161. Polythiophene: (j) Lazzaroni, R.; Brédas, J. L.; Dannetun, P.; Lögdlund, M.; Uvdal, K.; Salaneck, W. R. Synth. Met. 1991, 41-43, 3323-3328. Poly(vinyl alcohol): (k) Akhter, S.; Zhou, X.- L.; White, J. M. Appl. Surf. Sci. 1989, 37, 201-216. (l) Stoyanov, P.; Akhter, S.; White, J. M. Surf. Interface Anal. 1990, 15, 509-515.
25. Polyimides; (a) Atanasoska, Lj.; Anderson, S. G.; Meyer, H. M., III; Zhangda, L.; Weaver, J. H. J. Vac. Sci. Technol. A 1987, 5, 3325- 3333. (b) Bartha, J. W.; Hahn, P. O.; LeGoues, F.; Ho, P. S. J. Vac. Sci. Technol. A 1985, 3, 1390-1393. (c) Ho, P. S.; Hahn, P. O.; Bartha, J. W.; Rubloff, G. W.; LeGoues, F. K. J. Vac. Sci. Technol. A 1985, 3, 739-745. (d) Pireaux, J. J.; Vermeersch, M.; Grégoire, C.; Thiry, P. A.; Caudano, R. J. Chem. Phys. 1988, 88, 3353-3362. (e) Vasile, M. J.; Bachman, B. J. J. Vac. Sci. Technol. A 1989, 7, 2992-2997. (f) Domingue, A.; Dignard- Bailey, L.; Sacher, E.; Yelon, A.; Ellis, T. H. In Metallization of Polymers; Sacher, E., Kowalczyk, S. P., Pireaux, J.-J., Eds.; ACS Symposium Series 440; American Chemical Society: Washington, DC, 1990; pp 272-287. (g) Selmani, A. In Metallization of Polymers; Sacher, E., Kowalczyk, S. P., Pireaux, J.-J., Eds.; ACS Symposium Series 440; American Chemical Society: Washington, DC, 1990; pp 345-351. Poly(acrylic acid): (h) Dekoven, B. M.; Hagans, P. L. Appl. Surf. Sci. 1986, 27, 199-213. Poly(ethylene terephthalate): Bou, M.; Martin, J. M.; Le Mogne, Th. Appl. Surf. Sci. 1991, 47, 149-161. Polythiophene: (j) Lazzaroni, R.; Brédas, J. L.; Dannetun, P.; Lögdlund, M.; Uvdal, K.; Salaneck, W. R. Synth. Met. 1991, 41-43, 3323-3328. Poly(vinyl alcohol): (k) Akhter, S.; Zhou, X.- L.; White, J. M. Appl. Surf. Sci. 1989, 37, 201-216. (l) Stoyanov, P.; Akhter, S.; White, J. M. Surf. Interface Anal. 1990, 15, 509-515.
26. Polyimides; (a) Atanasoska, Lj.; Anderson, S. G.; Meyer, H. M., III; Zhangda, L.; Weaver, J. H. J. Vac. Sci. Technol. A 1987, 5, 3325- 3333. (b) Bartha, J. W.; Hahn, P. O.; LeGoues, F.; Ho, P. S. J. Vac. Sci. Technol. A 1985, 3, 1390-1393. (c) Ho, P. S.; Hahn, P. O.; Bartha, J. W.; Rubloff, G. W.; LeGoues, F. K. J. Vac. Sci. Technol. A 1985, 3, 739-745. (d) Pireaux, J. J.; Vermeersch, M.; Grégoire, C.; Thiry, P. A.; Caudano, R. J. Chem. Phys. 1988, 88, 3353-3362. (e) Vasile, M. J.; Bachman, B. J. J. Vac. Sci. Technol. A 1989, 7, 2992-2997. (f) Domingue, A.; Dignard-Bailey, L.; Sacher, E.; Yelon, A.; Ellis, T. H. In Metallization of Polymers; Sacher, E., Kowalczyk, S. P., Pireaux, J.-J., Eds.; ACS Symposium Series 440; American Chemical Society: Washington, DC, 1990; pp 272-287. (g) Selmani, A. In Metallization of Polymers; Sacher, E., Kowalczyk, S. P., Pireaux, J.-J., Eds.; ACS Symposium Series 440; American Chemical Society: Washington, DC, 1990; pp 345-351. Poly(acrylic acid): (h) Dekoven, B. M.; Hagans, P. L. Appl. Surf. Sci. 1986, 27, 199-213. Poly(ethylene terephthalate): Bou, M.; Martin, J. M.; Le Mogne, Th. Appl. Surf. Sci. 1991, 47, 149-161. Polythiophene: (j) Lazzaroni, R.; Brédas, J. L.; Dannetun, P.; Lögdlund, M.; Uvdal, K.; Salaneck, W. R. Synth. Met. 1991, 41-43, 3323-3328. Poly(vinyl alcohol): (k) Akhter, S.; Zhou, X.- L.; White, J. M. Appl. Surf. Sci. 1989, 37, 201-216. (l) Stoyanov, P.; Akhter, S.; White, J. M. Surf. Interface Anal. 1990, 15, 509-515.
27. Polyimides; (a) Atanasoska, Lj.; Anderson, S. G.; Meyer, H. M., III; Zhangda, L.; Weaver, J. H. J. Vac. Sci. Technol. A 1987, 5, 3325- 3333. (b) Bartha, J. W.; Hahn, P. O.; LeGoues, F.; Ho, P. S. J. Vac. Sci. Technol. A 1985, 3, 1390-1393. (c) Ho, P. S.; Hahn, P. O.; Bartha, J. W.; Rubloff, G. W.; LeGoues, F. K. J. Vac. Sci. Technol. A 1985, 3, 739-745. (d) Pireaux, J. J.; Vermeersch, M.; Grégoire, C.; Thiry, P. A.; Caudano, R. J. Chem. Phys. 1988, 88, 3353-3362. (e) Vasile, M. J.; Bachman, B. J. J. Vac. Sci. Technol. A 1989, 7, 2992-2997. (f) Domingue, A.; Dignard- Bailey, L.; Sacher, E.; Yelon, A.; Ellis, T. H. In Metallization of Polymers; Sacher, E., Kowalczyk, S. P., Pireaux, J.-J., Eds.; ACS Symposium Series 440; American Chemical Society: Washington, DC, 1990; pp 272-287. (g) Selmani, A. In Metallization of Polymers; Sacher, E., Kowalczyk, S. P., Pireaux, J.-J., Eds.; ACS Symposium Series 440; American Chemical Society: Washington, DC, 1990; pp 345-351. Poly(acrylic acid): (h) Dekoven, B. M.; Hagans, P. L. Appl. Surf. Sci. 1986, 27, 199-213. Poly(ethylene terephthalate): Bou, M.; Martin, J. M.; Le Mogne, Th. Appl. Surf. Sci. 1991, 47, 149-161. Polythiophene: (j) Lazzaroni, R.; Brédas, J. L.; Dannetun, P.; Lögdlund, M.; Uvdal, K.; Salaneck, W. R. Synth. Met. 1991, 41-43, 3323-3328. Poly(vinyl alcohol): (k) Akhter, S.; Zhou, X.- L.; White, J. M. Appl. Surf. Sci. 1989, 37, 201-216. (l) Stoyanov, P.; Akhter, S.; White, J. M. Surf. Interface Anal. 1990, 15, 509-515.
28. Polyimides; (a) Atanasoska, Lj.; Anderson, S. G.; Meyer, H. M., III; Zhangda, L.; Weaver, J. H. J. Vac. Sci. Technol. A 1987, 5, 3325- 3333. (b) Bartha, J. W.; Hahn, P. O.; LeGoues, F.; Ho, P. S. J. Vac. Sci. Technol. A 1985, 3, 1390-1393. (c) Ho, P. S.; Hahn, P. O.; Bartha, J. W.; Rubloff, G. W.; LeGoues, F. K. J. Vac. Sci. Technol. A 1985, 3, 739-745. (d) Pireaux, J. J.; Vermeersch, M.; Grégoire, C.; Thiry, P. A.; Caudano, R. J. Chem. Phys. 1988, 88, 3353-3362. (e) Vasile, M. J.; Bachman, B. J. J. Vac. Sci. Technol. A 1989, 7, 2992-2997. (f) Domingue, A.; Dignard- Bailey, L.; Sacher, E.; Yelon, A.; Ellis, T. H. In Metallization of Polymers; Sacher, E., Kowalczyk, S. P., Pireaux, J.-J., Eds.; ACS Symposium Series 440; American Chemical Society: Washington, DC, 1990; pp 272-287. (g) Selmani, A. In Metallization of Polymers; Sacher, E., Kowalczyk, S. P., Pireaux, J.-J., Eds.; ACS Symposium Series 440; American Chemical Society: Washington, DC, 1990; pp 345-351. Poly(acrylic acid): (h) Dekoven, B. M.; Hagans, P. L. Appl. Surf. Sci. 1986, 27, 199-213. Poly(ethylene terephthalate): Bou, M.; Martin, J. M.; Le Mogne, Th. Appl. Surf. Sci. 1991, 47, 149-161. Polythiophene: (j) Lazzaroni, R.; Brédas, J. L.; Dannetun, P.; Lögdlund, M.; Uvdal, K.; Salaneck, W. R. Synth. Met. 1991, 41-43, 3323-3328. Poly(vinyl alcohol): (k) Akhter, S.; Zhou, X.- L.; White, J. M. Appl. Surf. Sci. 1989, 37, 201-216. (l) Stoyanov, P.; Akhter, S.; White, J. M. Surf. Interface Anal. 1990, 15, 509-515.
29. Polyimides; (a) Atanasoska, Lj.; Anderson, S. G.; Meyer, H. M., III; Zhangda, L.; Weaver, J. H. J. Vac. Sci. Technol. A 1987, 5, 3325- 3333. (b) Bartha, J. W.; Hahn, P. O.; LeGoues, F.; Ho, P. S. J. Vac. Sci. Technol. A 1985, 3, 1390-1393. (c) Ho, P. S.; Hahn, P. O.; Bartha, J. W.; Rubloff, G. W.; LeGoues, F. K. J. Vac. Sci. Technol. A 1985, 3, 739-745. (d) Pireaux, J. J.; Vermeersch, M.; Grégoire, C.; Thiry, P. A.; Caudano, R. J. Chem. Phys. 1988, 88, 3353-3362. (e) Vasile, M. J.; Bachman, B. J. J. Vac. Sci. Technol. A 1989, 7, 2992-2997. (f) Domingue, A.; Dignard- Bailey, L.; Sacher, E.; Yelon, A.; Ellis, T. H. In Metallization of Polymers; Sacher, E., Kowalczyk, S. P., Pireaux, J.-J., Eds.; ACS Symposium Series 440; American Chemical Society: Washington, DC, 1990; pp 272-287. (g) Selmani, A. In Metallization of Polymers; Sacher, E., Kowalczyk, S. P., Pireaux, J.-J., Eds.; ACS Symposium Series 440; American Chemical Society: Washington, DC, 1990; pp 345-351. Poly(acrylic acid): (h) Dekoven, B. M.; Hagans, P. L. Appl. Surf. Sci. 1986, 27, 199-213. Poly(ethylene terephthalate): Bou, M.; Martin, J. M.; Le Mogne, Th. Appl. Surf. Sci. 1991, 47, 149-161. Polythiophene: (j) Lazzaroni, R.; Brédas, J. L.; Dannetun, P.; Lögdlund, M.; Uvdal, K.; Salaneck, W. R. Synth. Met. 1991, 41-43, 3323-3328. Poly(vinyl alcohol): (k) Akhter, S.; Zhou, X.- L.; White, J. M. Appl. Surf. Sci. 1989, 37, 201-216. (l) Stoyanov, P.; Akhter, S.; White, J. M. Surf. Interface Anal. 1990, 15, 509-515.
30. Polyimides; (a) Atanasoska, Lj.; Anderson, S. G.; Meyer, H. M., III; Zhangda, L.; Weaver, J. H. J. Vac. Sci. Technol. A 1987, 5, 3325- 3333. (b) Bartha, J. W.; Hahn, P. O.; LeGoues, F.; Ho, P. S. J. Vac. Sci. Technol. A 1985, 3, 1390-1393. (c) Ho, P. S.; Hahn, P. O.; Bartha, J. W.; Rubloff, G. W.; LeGoues, F. K. J. Vac. Sci. Technol. A 1985, 3, 739-745. (d) Pireaux, J. J.; Vermeersch, M.; Grégoire, C.; Thiry, P. A.; Caudano, R. J. Chem. Phys. 1988, 88, 3353-3362. (e) Vasile, M. J.; Bachman, B. J. J. Vac. Sci. Technol. A 1989, 7, 2992-2997. (f) Domingue, A.; Dignard- Bailey, L.; Sacher, E.; Yelon, A.; Ellis, T. H. In Metallization of Polymers; Sacher, E., Kowalczyk, S. P., Pireaux, J.-J., Eds.; ACS Symposium Series 440; American Chemical Society: Washington, DC, 1990; pp 272-287. (g) Selmani, A. In Metallization of Polymers; Sacher, E., Kowalczyk, S. P., Pireaux, J.-J., Eds.; ACS Symposium Series 440; American Chemical Society: Washington, DC, 1990; pp 345-351. Poly(acrylic acid): (h) Dekoven, B. M.; Hagans, P. L. Appl. Surf. Sci. 1986, 27, 199-213. Poly(ethylene terephthalate): Bou, M.; Martin, J. M.; Le Mogne, Th. Appl. Surf. Sci. 1991, 47, 149-161. Polythiophene: (j) Lazzaroni, R.; Brédas, J. L.; Dannetun, P.; Lögdlund, M.; Uvdal, K.; Salaneck, W. R. Synth. Met. 1991, 41-43, 3323-3328. Poly(vinyl alcohol): (k) Akhter, S.; Zhou, X.- L.; White, J. M. Appl. Surf. Sci. 1989, 37, 201-216. (l) Stoyanov, P.; Akhter, S.; White, J. M. Surf. Interface Anal. 1990, 15, 509-515.
31. Polyimides; (a) Atanasoska, Lj.; Anderson, S. G.; Meyer, H. M., III; Zhangda, L.; Weaver, J. H. J. Vac. Sci. Technol. A 1987, 5, 3325- 3333. (b) Bartha, J. W.; Hahn, P. O.; LeGoues, F.; Ho, P. S. J. Vac. Sci. Technol. A 1985, 3, 1390-1393. (c) Ho, P. S.; Hahn, P. O.; Bartha, J. W.; Rubloff, G. W.; LeGoues, F. K. J. Vac. Sci. Technol. A 1985, 3, 739-745. (d) Pireaux, J. J.; Vermeersch, M.; Grégoire, C.; Thiry, P. A.; Caudano, R. J. Chem. Phys. 1988, 88, 3353-3362. (e) Vasile, M. J.; Bachman, B. J. J. Vac. Sci. Technol. A 1989, 7, 2992-2997. (f) Domingue, A.; Dignard- Bailey, L.; Sacher, E.; Yelon, A.; Ellis, T. H. In Metallization of Polymers; Sacher, E., Kowalczyk, S. P., Pireaux, J.-J., Eds.; ACS Symposium Series 440; American Chemical Society: Washington, DC, 1990; pp 272-287. (g) Selmani, A. In Metallization of Polymers; Sacher, E., Kowalczyk, S. P., Pireaux, J.-J., Eds.; ACS Symposium Series 440; American Chemical Society: Washington, DC, 1990; pp 345-351. Poly(acrylic acid): (h) Dekoven, B. M.; Hagans, P. L. Appl. Surf. Sci. 1986, 27, 199-213. Poly(ethylene terephthalate): Bou, M.; Martin, J. M.; Le Mogne, Th. Appl. Surf. Sci. 1991, 47, 149-161. Polythiophene: (j) Lazzaroni, R.; Brédas, J. L.; Dannetun, P.; Lögdlund, M.; Uvdal, K.; Salaneck, W. R. Synth. Met. 1991, 41-43, 3323-3328. Poly(vinyl alcohol): (k) Akhter, S.; Zhou, X.-L.; White, J. M. Appl. Surf. Sci. 1989, 37, 201-216. (l) Stoyanov, P.; Akhter, S.; White, J. M. Surf. Interface Anal. 1990, 15, 509-515.
32. Polyimides; (a) Atanasoska, Lj.; Anderson, S. G.; Meyer, H. M., III; Zhangda, L.; Weaver, J. H. J. Vac. Sci. Technol. A 1987, 5, 3325- 3333. (b) Bartha, J. W.; Hahn, P. O.; LeGoues, F.; Ho, P. S. J. Vac. Sci. Technol. A 1985, 3, 1390-1393. (c) Ho, P. S.; Hahn, P. O.; Bartha, J. W.; Rubloff, G. W.; LeGoues, F. K. J. Vac. Sci. Technol. A 1985, 3, 739-745. (d) Pireaux, J. J.; Vermeersch, M.; Grégoire, C.; Thiry, P. A.; Caudano, R. J. Chem. Phys. 1988, 88, 3353-3362. (e) Vasile, M. J.; Bachman, B. J. J. Vac. Sci. Technol. A 1989, 7, 2992-2997. (f) Domingue, A.; Dignard- Bailey, L.; Sacher, E.; Yelon, A.; Ellis, T. H. In Metallization of Polymers; Sacher, E., Kowalczyk, S. P., Pireaux, J.-J., Eds.; ACS Symposium Series 440; American Chemical Society: Washington, DC, 1990; pp 272-287. (g) Selmani, A. In Metallization of Polymers; Sacher, E., Kowalczyk, S. P., Pireaux, J.-J., Eds.; ACS Symposium Series 440; American Chemical Society: Washington, DC, 1990; pp 345-351. Poly(acrylic acid): (h) Dekoven, B. M.; Hagans, P. L. Appl. Surf. Sci. 1986, 27, 199-213. Poly(ethylene terephthalate): Bou, M.; Martin, J. M.; Le Mogne, Th. Appl. Surf. Sci. 1991, 47, 149-161. Polythiophene: (j) Lazzaroni, R.; Brédas, J. L.; Dannetun, P.; Lögdlund, M.; Uvdal, K.; Salaneck, W. R. Synth. Met. 1991, 41-43, 3323-3328. Poly(vinyl alcohol): (k) Akhter, S.; Zhou, X.- L.; White, J. M. Appl. Surf. Sci. 1989, 37, 201-216. (l) Stoyanov, P.; Akhter, S.; White, J. M. Surf. Interface Anal. 1990, 15, 509-515.
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73. D) to one (λ). Applying the size -effect relationship, the expression for Al particle dielectric function as a sum of the two contributions and the Maxwell - Garnett-type effective medium theory, Q, F, and λ, can be deduced from a LRA of the dielectric functions of Figure 16.
74. 2S and HCl vapor into densely packed alkanoic acid SAMs on Ag substrates interfaces results in chemical disruption of the SAM/Ag interface, with subsequent reorganization of the adsorbate molecules into discrete crystallites of bulklike material dispersed across the substrate surface (Tao, Y.-T.; Lin, W.-L.; Hietpas, G. D.; Allara, D. L. J. Phys. Chem. B 1997, 101, 9732-9740. Tao, Y.-T.; Hietpas, G. D.; Allara, D. L. J. Am. Chem. Soc. 1996, 118, 6724-6735).
75. 2S and HCl vapor into densely packed alkanoic acid SAMs on Ag substrates interfaces results in chemical disruption of the SAM/Ag interface, with subsequent reorganization of the adsorbate molecules into discrete crystallites of bulklike material dispersed across the substrate surface (Tao, Y.-T.; Lin, W.-L.; Hietpas, G. D.; Allara, D. L. J. Phys. Chem. B 1997, 101, 9732-9740. Tao, Y.-T.; Hietpas, G. D.; Allara, D. L. J. Am. Chem. Soc. 1996, 118, 6724-6735).
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84. One must be cautious about such inferences. Literature values for core-level shifts in Al compounds have a wide range, typically ±1 eV (see refs 27 and 28), partly because the values come from spectra taken on bulk materials. Since the present case involves a very thin surface layer of Al-O-C species, it is possible that the formation of isolated, cluster-like surface species would cause the shift to 75 eV relative to ∼74 eV observed for bulk aluminum oxide.
85. 3 group. The minimum potential energy structure obtained shows a single atom per functional group, a loss of C=O π bonding, and the presence of a negative charge on the central C and a positive charge on Al.
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