X-ray mirrors on flexible polymer substrates fabricated by atomic layer deposition

Thin Solid Films

Volumn 515, Issue 18, 2007, Pages 7177-7180

  Fabreguette, Francois H ^a   George, Steven M ^a,b  

^a UNIVERSITY OF COLORADO   (United States)

^b UCB 450   (United States)

Author keywords

Atomic layer deposition (ALD); Polymers; Tungsten; X ray mirrors

Indexed keywords

EID: 34249073720     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.03.044     Document Type: Letter

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