Surface and sub-surface reactions during low temperature aluminium oxide atomic layer deposition on fiber-forming polymers

Journal of Materials Chemistry

Volumn 20, Issue 20, 2010, Pages 4213-4222

  Spagnola, Joseph C ^a   Gong, Bo ^a   Arvidson, Sara A ^a   Jur, Jesse S ^a   Khan, Saad A ^a   Parsons, Gregory N ^a  

^a North Carolina State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINIUM OXIDE; AMINE UNITS; CARBONYL GROUPS; CHEMICAL PRECURSORS; COATING STRUCTURES; CROSS SECTIONAL TRANSMISSION ELECTRON MICROSCOPY; FIBER SURFACE; FILM COATINGS; HIGH-MOLECULAR WEIGHT POLYMERS; IN-SITU; INORGANIC THIN FILMS; LOW TEMPERATURES; METHYL GROUP; POLYAMIDE 6; POLYMER COATING; POLYMER COMPOSITION; PRECURSOR DIFFUSION; QUARTZ CRYSTAL MICROGRAVIMETRY; REACTION CYCLES; REACTION PATHWAYS; REACTION PROCESS; SUB-SURFACES; SURFACE MODIFICATION; TEMPERATURE DEPENDENT; TRIMETHYLALUMINIUM; VAPOR PHASE;

ALUMINA; AMIDES; CHEMICAL MODIFICATION; HYDROCARBONS; INORGANIC COATINGS; OXIDE MINERALS; PLASTIC COATINGS; POLYMERS; QUARTZ; SCANNING ELECTRON MICROSCOPY; THERMOPLASTICS; TRANSMISSION ELECTRON MICROSCOPY; VAPOR DEPOSITION; WATER VAPOR;

SURFACE REACTIONS;

EID: 77952361153     PISSN: 09599428     EISSN: 13645501     Source Type: Journal    
DOI: 10.1039/c0jm00355g     Document Type: Article

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