Kinetics of stop-flow atomic layer deposition for high aspect ratio template filling through photonic band gap measurements

Journal of Physical Chemistry C

Volumn 114, Issue 35, 2010, Pages 14843-14848

  Karuturi, Siva Krishna ^a   Liu, Lijun ^a   Su, Liap Tat ^a   Zhao, Yang ^a   Fan, Hong Jin ^b   Ge, Xiaochen ^c   He, Sailing ^c   Yoong, Alfred Tok Iing ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c ZHEJIANG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BAND DIAGRAMS; CONFORMAL FILLING; CONTINUOUS FLOWS; CONTINUOUS-FLOW PROCESS; CYCLE TIME; DEFECT-FREE; DEPOSITION KINETICS; DEPOSITION PROCESS; DEPTH PROFILE; FILLING KINETICS; FLOW PROCESS; HIGH ASPECT RATIO; KNUDSEN FLOW; OPAL PHOTONIC CRYSTALS; OPAL TEMPLATE; PHOTONIC BAND GAP PROPERTIES; PHOTONIC BANDS; PRECURSOR GAS; QUANTITATIVE INVESTIGATION; SAMPLE PREPARATION TECHNIQUES; SELF-ASSEMBLED; STEP COVERAGE; TIO; TRANSMITTANCE SPECTRA;

ASPECT RATIO; ATOMIC LAYER DEPOSITION; ENERGY GAP; FILLING; NANOSTRUCTURES; PHOTONIC CRYSTALS; SILICATE MINERALS;

PHOTONIC BAND GAP;

EID: 78650806878     PISSN: 19327447     EISSN: 19327455     Source Type: Journal    
DOI: 10.1021/jp1053748     Document Type: Article

References (31)

1. Ritala, M.; Leskelä, M. Nanotechnology 1999, 10, 19.
2. Knez, M.; Nielsch, K.; Niinistö, Adv. Mater. 2007, 19, 3425.
3. Leskelä, M.; Kemell, M.; Kukli, K.; Pore, V.; Santala, E.; Ritala, M.; Lu, J. Mater. Sci. Eng., C 2007, 27, 1504.
4. Kim, H.; Lee, H. B. R.; Maeng, W. J. Thin Solid Films 2009, 517, 2563.
5. Nanu, M.; Schoonman, J.; Goossens, A. Adv. Mater. 2004, 16, 453.
6. Banerjee, P.; Perez, I.; Henn-Lecordier, L.; Lee, S. B.; Rubloff, G. W. Nature Nanotechnol. 2009, 4, 292.
7. King, J. S.; Wittstock, A.; Biener, J.; Kucheyev, S. O.; Wang, Y. M.; Baumann, T. F.; Giri, S. K.; Hamza, A. V.; Baeumer, M.; Bent, S. F. Nano Lett. 2008, 8, 2405.
8. Alessandri, I.; Zucca, M.; Ferroni, M.; Bontempi, E.; Depero, L. E. Small 2009, 5, 336.
9. King, J. S.; Galliot, D. P.; Graugnard, E.; Summers, C. J. Adv. Mater. 2006, 18, 1063.
10. Fan, H. J.; Knez, M.; Scholz, R.; Nielsch, K.; Pippel, E.; Hesse, D.; Zacharias, M.; Gösele, U. Nat. Mater. 2006, 5, 627.
11. Knez, M.; Kadri, A.; Wege, C.; Gösele, U.; Jeske, H.; Nielsch, K. Nano Lett. 2006, 6, 1172.
12. Peng, Q.; Sun, X. Y.; Spagnola, J. C.; Hyde, G. K.; Spontak, R. J.; Parsons, G. N. Nano Lett. 2007, 7, 719.
13. Kim, G.-M.; Lee, S.-M.; Michler, G. H.; Roggendorf, H.; Gösele, U.; Knez, M. Chem. Mater. 2008, 20, 3085.
14. Elam, J. W.; Routkevitch, D.; Mardilovich, P. P.; George, S. M. Chem. Mater. 2003, 15, 3507.
15. Berland, B. S.; Gartland, I. P.; Ott, A. W.; George, S. M. Chem. Mater. 1998, 10, 3941.
16. Gordon, R. G.; Hausmann, D.; Kim, E.; Shepard, J. Chem. Vap. Deposition 2003, 9, 73.
17. Kucheyev, S. O.; Biener, J.; Baumann, T. F.; Wang, Y. M.; Hamza, A. V.; Li, Z.; Lee, D. K.; Gordon, R. G. Langmuir 2008, 24, 943.
18. Huang, J.; Wang, X.; Wang, Z. L. Nanotechnology 2008, 19.
19. Kim, W. H.; Park, S. J.; Son, J. Y.; Kim, H. Nanotechnology 2008, 19.
20. King, J. S.; Graugnard, E.; Summers, C. J. Adv. Mater. 2005, 17, 1010.
21. Brzezinski, A.; Chen, Y. C.; Wiltzius, P.; Braun, P. V. J. Mater. Chem. 2009, 19, 9126.
22. Sundaram, G. M.; Deguns, E. W.; Bhatia, R.; Dalberth, M. J.; Sowa, M. J.; Becker, J. S. Solid State Technol. 2009, 52, 14.
23. Hausmann, D. M.; Kim, E.; Becker, J.; Gordon, R. G. Chem. Mater. 2002, 14, 4350.
24. Graugnard, E.; Chawla, V.; Lorang, D.; Summers, C. J. Appl. Phys. Lett. 2006, 89.
25. Elam, J. W.; Groner, M. D.; George, S. M. Rev. Sci. Instrum. 2002, 73, 2981.
26. Teh, L. K.; Tan, N. K.; Wong, C. C.; Li, S. Appl. Phys. A: Mater. Sci. Process. 2005, 81, 1399.
27. Norris, D. J.; Arlinghaus, E. G.; Meng, L.; Heiny, R.; Scriven, L. E. Adv. Mater. 2004, 16.
28. Busch, K.; von Freymann, G.; Linden, S.; Mingaleev, S. F.; Tkeshelashvili, L.; Wegener, M. Phys. Rep. 2007, 444, 101.
29. Newton, M. R.; Morey, K. A.; Zhang, Y.; Snow, R. J.; Diwekar, M.; Shi, J.; White, H. S. Nano Lett. 2004, 4, 875.
30. Reijnen, L.; Feddes, B.; Vredenberg, A. M.; Schoonman, J.; Goossens, A. J. Phys. Chem. B 2004, 108, 9133.
31. King, J. S.; Graugnard, E.; Roche, O. M.; Sharp, D. N.; Scrimgeour, J.; Denning, R. G.; Turberfield, A. J.; Summers, C. J. Adv. Mater. 2006, 18, 1561.