메뉴 건너뛰기




Volumn 17, Issue 4, 2011, Pages 358-370

Structure, properties and applications of diamond like nanocomposite (SiO x containing DLC) films: A review

Author keywords

Diamond like nanocomposite films; SiO x containing diamond like carbon

Indexed keywords


EID: 84869231631     PISSN: 13921320     EISSN: None     Source Type: Journal    
DOI: 10.5755/j01.ms.17.4.770     Document Type: Review
Times cited : (71)

References (78)
  • 1
    • 84869236328 scopus 로고
    • Deposition of Carbon Films with Diamond Properties
    • Aisenberg, S., Chabot, R., Deposition of Carbon Films with Diamond Properties. Carbon 10 1972: p. 356.
    • (1972) Carbon , vol.10 , pp. 356
    • Aisenberg, S.1    Chabot, R.2
  • 5
    • 54249153821 scopus 로고    scopus 로고
    • Comparison of Diamond-like Carbon to Diamond for Applications
    • Robertson, J. Comparison of Diamond-like Carbon to Diamond for Applications. Physica Status Solidi A 205 2008: pp. 2233-2244.
    • (2008) Physica Status Solidi A , vol.205 , pp. 2233-2244
    • Robertson, J.1
  • 6
    • 0026867491 scopus 로고
    • Diamond-Like Nanocomposites (DLN)
    • Dorfman, V. F. Diamond-Like Nanocomposites (DLN). Thin Solid Films 212 1992: p. 267. http://dx.doi.org/10.1016/0040-6090(92)90532-G.
    • (1992) Thin Solid Films , vol.212 , pp. 267
    • Dorfman, V.F.1
  • 8
  • 9
    • 77954204751 scopus 로고    scopus 로고
    • Characterization of Diamond-like Nanocomposite Thin Films Grown by Plasma Enhanced Chemical Vapor Deposition
    • Santra, T. S., Liu, C. H., Bhattacharyya, T. K., Patel, P., Barik, T. K. Characterization of Diamond-like Nanocomposite Thin Films Grown by Plasma Enhanced Chemical Vapor Deposition. Journal of Applied Physics 107 2010: p. 124320.
    • (2010) Journal of Applied Physics , vol.107 , pp. 124320
    • Santra, T.S.1    Liu, C.H.2    Bhattacharyya, T.K.3    Patel, P.4    Barik, T.K.5
  • 10
    • 80052349970 scopus 로고    scopus 로고
    • Structural and Tribological Properties of Diamond-like Nanocomposite Thin Films
    • Santra, T. S., Bhattacharyya, T. K., Patel, P., Tseng, F. G., Barik, T. K. Structural and Tribological Properties of Diamond-like Nanocomposite Thin Films. Surface & Coatings Technology 206 2011: pp. 228-233. http://dx.doi.org/10.1016/j.surfcoat.2011.06.057
    • (2011) Surface & Coatings Technology , vol.206 , pp. 228-233
    • Santra, T.S.1    Bhattacharyya, T.K.2    Patel, P.3    Tseng, F.G.4    Barik, T.K.5
  • 11
    • 0037083751 scopus 로고    scopus 로고
    • Temperature Dependence of Mechanical Properties of DLC/Si Protective Coatings Prepared by PECVD
    • Buršíkóvá, V., Navrátil, V., Zajíčková, L., Janča, J. Temperature Dependence of Mechanical Properties of DLC/Si Protective Coatings Prepared by PECVD. Materials Science and Engineering A 324 2002: pp. 251-254. http://dx.doi.org/10.1016/S0921-5093(01)01320-X
    • (2002) Materials Science and Engineering , vol.324 A , pp. 251-254
    • Buršíkóvá, V.1    Navrátil, V.2    Zajíčková, L.3    Janča, J.4
  • 12
    • 0031994110 scopus 로고    scopus 로고
    • Variation of the Wettability of DLC-coatings by Network Modification Using Silicon and Oxygen
    • Grischke, M., Hieke, A., Morgenweck, F., Dimigen, H. Variation of the Wettability of DLC-coatings by Network Modification Using Silicon and Oxygen. Diamond and Related Materials 7 1998: pp. 454-458.
    • (1998) Diamond and Related Materials , vol.7 , pp. 454-458
    • Grischke, M.1    Hieke, A.2    Morgenweck, F.3    Dimigen, H.4
  • 14
    • 0037532334 scopus 로고    scopus 로고
    • Analysis of Microwear Experiments on Thin DLC Coatings Friction, Wear and Plastic Deformation
    • Schiffmann, K. I., Hieke, A. Analysis of Microwear Experiments on Thin DLC Coatings: Friction, Wear and Plastic Deformation. Wear 254 2003: pp. 565-572.
    • (2003) Wear , vol.254 , pp. 565-572
    • Schiffmann, K.I.1    Hieke, A.2
  • 15
    • 38749118629 scopus 로고    scopus 로고
    • Plasma Deposition and Characterization of Silicon Oxide-containing Diamond- like Carbon Films Obtained from CH4:SiH4:O2 Gas Mixtures
    • Damasceno, J. C., Camargo Jr., S. S. Plasma Deposition and Characterization of Silicon Oxide-containing Diamond- like Carbon Films Obtained from CH4:SiH4:O2 Gas Mixtures. Thin Solid Films 516 2008: pp. 1890-1897. http://dx.doi.org/10.1016/j.tsf.2007.10.119
    • (2008) Thin Solid Films , vol.516 , pp. 1890-1897
    • Damasceno, J.C.1    Camargo, S.S.2
  • 16
    • 67649657563 scopus 로고    scopus 로고
    • Molecular Structure of SiOx- incorporated Diamond-like Carbon Films; Evidence for Phase Segregation
    • Randeniya, L. K., Bendavid, A., Martin, P. J., Amin, M. S., Preston, E. W. Molecular Structure of SiOx- incorporated Diamond-like Carbon Films; Evidence for Phase Segregation. Diamond & Related Materials 18 2009: pp. 1167-1173. http://dx.doi.org/10.1016/j.diamond.2009.03.004
    • (2009) Diamond & Related Materials , vol.18 , pp. 1167-1173
    • Randeniya, L.K.1    Bendavid, A.2    Martin, P.J.3    Amin, M.S.4    Preston, E.W.5
  • 17
    • 0037851425 scopus 로고    scopus 로고
    • Effects of SiOx-incorporation Hydrocarbons on the Tribological Properties of DLC Films
    • Chen, L.-Y., Hong, F. C.-N. Effects of SiOx-incorporation Hydrocarbons on the Tribological Properties of DLC Films. Diamond & Related Materials 10 2001: pp. 1058-1062. http://dx.doi.org/10.1016/S0925-9635(00)00573-2
    • (2001) Diamond & Related Materials , vol.10 , pp. 1058-1062
    • Chen, L.-Y.1    Hong F., C.-N.2
  • 18
    • 80051551221 scopus 로고    scopus 로고
    • Adhesion Property of SiOx-doped Diamond-like Carbon Films Deposited on Polycarbonate by Inductively Coupled Plasma Chemical Vapor Deposition
    • Baek, S.-M., Shirafuji, T., Saito, N., Takai, O. Adhesion Property of SiOx-doped Diamond-like Carbon Films Deposited on Polycarbonate by Inductively Coupled Plasma Chemical Vapor Deposition. Thin Solid Films 519 2011: pp. 6678-6682.
    • (2011) Thin Solid Films , vol.519 , pp. 6678-6682
    • Baek, S.-M.1    Shirafuji, T.2    Saito, N.3    Takai, O.4
  • 19
    • 0037711194 scopus 로고    scopus 로고
    • Diamond-like Carbon Nanocomposite Films
    • Chen, L.-Y., Hong, F. C.-N. Diamond-like Carbon Nanocomposite Films. Applied Physics Letters 82 2003: pp. 3526-3528. http://dx.doi.org/10.1063/1.1576909
    • (2003) Applied Physics Letters , vol.82 , pp. 3526-3528
    • Chen, L.-Y.1    Hong F., C.-N.2
  • 20
    • 0037846295 scopus 로고    scopus 로고
    • Adhesion Improvements for Diamond-like Carbon Films on Polycarbonate and Polymethylmethacrylate Substrates by Ion Plating with Inductively Coupled Plasma
    • Guo, Y.-B., Hong, F. C.-N. Adhesion Improvements for Diamond-like Carbon Films on Polycarbonate and Polymethylmethacrylate Substrates by Ion Plating with Inductively Coupled Plasma. Diamond and Related Materials 12 2003: pp. 946-952.
    • (2003) Diamond and Related Materials , vol.12 , pp. 946-952
    • Guo, Y.-B.1    Hong F., C.-N.2
  • 21
    • 3042719522 scopus 로고    scopus 로고
    • Friction and Thermal Effects of Engineering Plastics Sliding against Steel and DLN-coated Counterfaces
    • Zsidai, L., Samyn, P., Vercammen, K., Van Acker, K., Kozma, M., Kalácska, G., De Baets, P. Friction and Thermal Effects of Engineering Plastics Sliding against Steel and DLN-coated Counterfaces. Tribology Letters 17 2004: pp. 269-288. http://dx.doi.org/10.1023/B:TRIL.0000032453.09366.d4
    • (2004) Tribology Letters , vol.17 , pp. 269-288
    • Zsidai, L.1    Samyn, P.2    Vercammen, K.3    van Acker, K.4    Kozma, M.5    Kalácska, G.6    de Baets, P.7
  • 22
    • 0032048855 scopus 로고    scopus 로고
    • Diamond-like Nanocomposite Coatings for Low-wear and Low-friction Applications in Humid Environments
    • Neerinck, D., Persoone, P., Sercu, M., Goel, A., Venkatraman, C., Kester, D., Halter, C., Swab, P., Bray, D. Diamond-like Nanocomposite Coatings for Low-wear and Low-friction Applications in Humid Environments. Thin Solid Films 317 1998: pp. 402-404. http://dx.doi.org/10.1016/S0040-6090(97)00631-7
    • (1998) Thin Solid Films , vol.317 , pp. 402-404
    • Neerinck, D.1    Persoone, P.2    Sercu, M.3    Goel, A.4    Venkatraman, C.5    Kester, D.6    Halter, C.7    Swab, P.8    Bray, D.9
  • 23
    • 42749092108 scopus 로고    scopus 로고
    • The Role of Substrate Plasticity on the Tribological Behavior of Diamond-like Nanocomposite Coatings
    • Jungk, J. M., Michael, J. R., Prasad, S. V. The Role of Substrate Plasticity on the Tribological Behavior of Diamond-like Nanocomposite Coatings. Acta Materialia, 56 2008: pp. 1956-1966. http://dx.doi.org/10.1016/j.actamat.2007.12.048
    • (2008) Acta Materialia , vol.56 , pp. 1956-1966
    • Jungk, J.M.1    Michael, J.R.2    Prasad, S.V.3
  • 24
    • 84869221018 scopus 로고    scopus 로고
    • Diamond-Like Nanocomposite (DLN) Films for Microelectro-Mechanical System (MEMS) Proceedings Published by International
    • Santra, T. S., Bhattacharyya, T. K., Tseng, F. G., Barik, T. K. Diamond-Like Nanocomposite (DLN) Films for Microelectro-Mechanical System (MEMS) Proceedings Published by International. Journal of Computer Applications 2011: pp. 6-9.
    • (2011) Journal of Computer Applications , pp. 6-9
    • Santra, T.S.1    Bhattacharyya, T.K.2    Tseng, F.G.3    Barik, T.K.4
  • 25
    • 0142055425 scopus 로고    scopus 로고
    • Monitoring Transfer Films and Friction Instabilities with in Situ Raman Tribometry
    • Scharf, T. W., Singer, I. L. Monitoring Transfer Films and Friction Instabilities with in Situ Raman Tribometry. Tribology Letters 14 2003: pp.3-8. http://dx.doi.org/10.1023/A:1021942830132
    • (2003) Tribology Letters , vol.14 , pp. 3-8
    • Scharf, T.W.1    Singer, I.L.2
  • 26
    • 0032007250 scopus 로고    scopus 로고
    • Diamond-like Nanocomposite Coatings (a-C:H/a-Si:O) for Tribological Applications
    • Neerinck, D., Persoone, P., Sercu, M., Goel, A., Kester, D., Bray, D. Diamond-like Nanocomposite Coatings (a-C:H/a-Si:O) for Tribological Applications. Diamond and Related Materials 7 1998: pp. 468-471. http://dx.doi.org/10.1016/S0925-9635(97)00201-X
    • (1998) Diamond and Related Materials , vol.7 , pp. 468-471
    • Neerinck, D.1    Persoone, P.2    Sercu, M.3    Goel, A.4    Kester, D.5    Bray, D.6
  • 28
    • 84861645071 scopus 로고    scopus 로고
    • Carrier Gas and Ion Beam Parameter Effects on the Structure and Properties of a-C:H/SiOx Films Deposited Employing Closed Drift Ion Beam Source
    • doi:10.1016/j.nimb.2011.08.064
    • Tamulevičiene, A., Meškinis, Š., Kopustinskas, V., Tamulevičius, S. Carrier Gas and Ion Beam Parameter Effects on the Structure and Properties of a-C:H/SiOx Films Deposited Employing Closed Drift Ion Beam Source. Nuclear Instruments and Methods in Physics Research Section B 2011. doi:10.1016/j.nimb.2011.08.064.
    • (2011) Nuclear Instruments and Methods In Physics Research Section B
    • Tamulevičiene, A.1    Meškinis, Š.2    Kopustinskas, V.3    Tamulevičius, S.4
  • 29
    • 79952435685 scopus 로고    scopus 로고
    • Deposition of SiOx Containing DLC Films Using Different Transport Gas in a Closed Drift Ion Beam Source Program and Materials of 3rd International Conference
    • Kaunas, Lithuania
    • Tamulevičiene, A., Kopustinskas, V., Meškinis, Š., Tamulevičius, S. Deposition of SiOx Containing DLC Films Using Different Transport Gas in a Closed Drift Ion Beam Source Program and Materials of 3rd International Conference. ";Radiation Interaction with Materials and Its Use in Technologies" Kaunas, Lithuania, 2010: pp. 169-172.
    • (2010) Radiation Interaction With Materials and Its Use In Technologies , pp. 169-172
    • Tamulevičiene, A.1    Kopustinskas, V.2    Meškinis, Š.3    Tamulevičius, S.4
  • 33
    • 77950022232 scopus 로고    scopus 로고
    • Ion Beam Energy Effects on Structure and Properties of Diamond-like Carbon Films Deposited by Closed Drift Ion Source
    • Meškinis, Š., Kopustinskas, V., Tamulevičiene, A., Tamulevičius, S., Niaura, G., Jankauskas, J., Gudaitis, R. Ion Beam Energy Effects on Structure and Properties of Diamond-like Carbon Films Deposited by Closed Drift Ion Source. Vacuum 84 2010: pp. 1133-1137. http://dx.doi.org/10.1016/j.vacuum.2010.01.047
    • (2010) Vacuum , vol.84 , pp. 1133-1137
    • Meškinis, Š.1    Kopustinskas, V.2    Tamulevičiene, A.3    Tamulevičius, S.4    Niaura, G.5    Jankauskas, J.6    Gudaitis, R.7
  • 38
    • 0042622645 scopus 로고    scopus 로고
    • Thickness of Diamond-like Carbon Coatings Quantified with Raman Spectroscopy
    • Scharf, T. W., Singer, I. L. Thickness of Diamond-like Carbon Coatings Quantified with Raman Spectroscopy. Thin Solid Films 440 2003: pp. 138-144.
    • (2003) Thin Solid Films , vol.440 , pp. 138-144
    • Scharf, T.W.1    Singer, I.L.2
  • 39
    • 17644413211 scopus 로고    scopus 로고
    • Nanomechanical Properties of Silicon-, Oxygen- and Nitrogen-containing a-C:H Films Prepared by RF Plasma Beam CVD
    • Tóth, A., Mohai, M., Ujvári, T., Bertóti, I. Nanomechanical Properties of Silicon-, Oxygen- and Nitrogen-containing a-C:H Films Prepared by RF Plasma Beam CVD. Thin Solid Films 482 2005: pp. 188-191. http://dx.doi.org/10.1016/j.tsf.2004.11.168
    • (2005) Thin Solid Films , vol.482 , pp. 188-191
    • Tóth, A.1    Mohai, M.2    Ujvári, T.3    Bertóti, I.4
  • 41
    • 18444388904 scopus 로고    scopus 로고
    • Surface and Nanomechanical Properties of Si:C:H Films Prepared by RF Plasma Beam CVD
    • Tóth, A., Mohai, M., Ujvári, T., Bertóti, I. Surface and Nanomechanical Properties of Si:C:H Films Prepared by RF Plasma Beam CVD. Diamond & Related Materials 14 2005: pp. 954-958.
    • (2005) Diamond & Related Materials , vol.14 , pp. 954-958
    • Tóth, A.1    Mohai, M.2    Ujvári, T.3    Bertóti, I.4
  • 43
    • 33646154445 scopus 로고    scopus 로고
    • DLC-SiOx Nano-composite Films Deposited from CH4:SiH4:O2 Gas Mixtures
    • Damasceno, J. C., Camargo Jr., S. S. DLC-SiOx Nano-composite Films Deposited from CH4:SiH4:O2 Gas Mixtures. Surface & Coatings Technology 200 2006: pp. 6279-6282.
    • (2006) Surface & Coatings Technology , vol.200 , pp. 6279-6282
    • Damasceno, J.C.1    Camargo, S.S.2
  • 44
    • 0036530752 scopus 로고    scopus 로고
    • Improvement of the Effiency of the Silicon Solar Cells by Silicon Incorporated Diamond-like Carbon Antireflective Coatings
    • Bursikova, V., Sladek, P., St'ahel, P., Zajickova, L. Improvement of the Effiency of the Silicon Solar Cells by Silicon Incorporated Diamond-like Carbon Antireflective Coatings. Journal of Non-Crystalline Solids 299-302 2002: pp. 1147-1151.
    • (2002) Journal of Non-Crystalline Solids , vol.299-302 , pp. 1147-1151
    • Bursikova, V.1    Sladek, P.2    St'ahel, P.3    Zajickova, L.4
  • 45
    • 0142247030 scopus 로고    scopus 로고
    • Optical Properties of Diamond-like Carbon Films Containing SiOx
    • Franta, D., Ohlidal, I., Bursikova, V., Zajickova, L. Optical Properties of Diamond-like Carbon Films Containing SiOx. Diamond and Related Materials 12 2003: pp. 1532-1538. http://dx.doi.org/10.1016/S0925-9635(03)00221-8
    • (2003) Diamond and Related Materials , vol.12 , pp. 1532-1538
    • Franta, D.1    Ohlidal, I.2    Bursikova, V.3    Zajickova, L.4
  • 46
    • 67349246435 scopus 로고    scopus 로고
    • Incorporation of Si and SiOx into Diamond-like Carbon Films: Impact on Surface Properties and Osteoblast Adhesion
    • Randeniya, L. K., Bendavid, A., Martin, P. J., Amin, Md. S., Preston, E. W., Magdon Ismail, F. S., Coe, S. Incorporation of Si and SiOx into Diamond-like Carbon Films: Impact on Surface Properties and Osteoblast Adhesion. Acta Biomaterialia 5 2009, pp. 1791-1797.
    • (2009) Acta Biomaterialia , vol.5 , pp. 1791-1797
    • Randeniya, L.K.1    Bendavid, A.2    Martin, P.J.3    Amin Md., S.4    Preston, E.W.5    Magdon, I.F.S.6    Coe, S.7
  • 47
    • 0037733929 scopus 로고    scopus 로고
    • Structural Characteristics of Diamond-like Nanocomposite Films Grown by PECVD
    • Yang, W. J., Choa, Y.-H., Sekino, T., Shim, K. B., Niihara, K., Auh, K. H. Structural Characteristics of Diamond-like Nanocomposite Films Grown by PECVD. Materials Letters 57 2003: pp. 3305-3310. http://dx.doi.org/10.1016/S0167-577X(03)00053-3
    • (2003) Materials Letters , vol.57 , pp. 3305-3310
    • Yang, W.J.1    Choa, Y.-H.2    Sekino, T.3    Shim, K.B.4    Niihara, K.5    Auh, K.H.6
  • 48
    • 0037011081 scopus 로고    scopus 로고
    • XPS and XRR Studies on Microstructures and Interfaces of DLC Films Deposited by FCVA Method
    • Park, C. K., Chang, S. M., Uhm, H. S., Seo, S. H., Park, J. S. XPS and XRR Studies on Microstructures and Interfaces of DLC Films Deposited by FCVA Method. Thin Solid Films 420-421 2002: pp. 235-240.
    • (2002) Thin Solid Films , vol.420-421 , pp. 235-240
    • Park, C.K.1    Chang, S.M.2    Uhm, H.S.3    Seo, S.H.4    Park, J.S.5
  • 49
    • 29244449327 scopus 로고    scopus 로고
    • Raman and XPS Studies of DLC Films Prepared by a Magnetron Sputter-type Negative Ion Source
    • Paik, N. Raman and XPS Studies of DLC Films Prepared by a Magnetron Sputter-type Negative Ion Source. Surface & Coatings Technology 200 2005: pp. 2170-2174. http://dx.doi.org/10.1016/j.surfcoat.2004.08.073
    • (2005) Surface & Coatings Technology , vol.200 , pp. 2170-2174
    • Paik, N.1
  • 50
    • 6344287341 scopus 로고    scopus 로고
    • Development of a Methodology for XPS Curve-fitting of the Si 2p Core Level of Siloxane Materials
    • O'Hare, L.-A., Parbhoo, B., Leadley, S. R. Development of a Methodology for XPS Curve-fitting of the Si 2p Core Level of Siloxane Materials. Surface and Interface Analysis 36 2004: pp. 1427-1434.
    • (2004) Surface and Interface Analysis , vol.36 , pp. 1427-1434
    • O'Hare, L.-A.1    Parbhoo, B.2    Leadley, S.R.3
  • 51
    • 0032761517 scopus 로고    scopus 로고
    • A Study of HMDSO/O2 Plasma Deposits Using a High-sensitivity and Energy Resolution XPS Instrument: Curve Fitting of the Si 2p Core Level
    • Alexander, M. R., Short, R. D., Jones, F. R., Michaeli, W., Blomfield, C. J. A Study of HMDSO/O2 Plasma Deposits Using a High-sensitivity and Energy Resolution XPS Instrument: Curve Fitting of the Si 2p Core Level. Applied Surface Science 137 1999: pp. 179-183. http://dx.doi.org/10.1016/S0169-4332(98)00479-6
    • (1999) Applied Surface Science , vol.137 , pp. 179-183
    • Alexander, M.R.1    Short, R.D.2    Jones, F.R.3    Michaeli, W.4    Blomfield, C.J.5
  • 52
    • 56949094013 scopus 로고    scopus 로고
    • Hydrophobicity in DLC Films Prepared by Electrodeposition Technique
    • Paul, R., Dalui, S., Das, S.N., Bhar, R., Pal, A. K. Hydrophobicity in DLC Films Prepared by Electrodeposition Technique. Applied Surface Science 255 2008: pp. 1705-1711.
    • (2008) Applied Surface Science , vol.255 , pp. 1705-1711
    • Paul, R.1    Dalui, S.2    Das, S.N.3    Bhar, R.4    Pal, A.K.5
  • 53
    • 0347948258 scopus 로고    scopus 로고
    • Preparation and Characterization of Hydrogenated Diamond-like Carbon Filmsin a Dual DC-RF Plasma System
    • Li, H., Xu, T., Chen, J., Zhou, H., Liu, H., Preparation and Characterization of Hydrogenated Diamond-like Carbon Filmsin a Dual DC-RF Plasma System. Journal of Physics D: Applied Physics 36 2003: pp.3183-3190. http://dx.doi.org/10.1088/0022-3727/36/24/014
    • (2003) Journal of Physics D: Applied Physics , vol.36 , pp. 3183-3190
    • Li, H.1    Xu, T.2    Chen, J.3    Zhou, H.4    Liu, H.5
  • 54
    • 8744258828 scopus 로고    scopus 로고
    • Raman Spectroscopy of Amorphous, Nanostructures, Diamond-like Carbon, and Nanodiamond
    • Ferrari, A. C., Robertson, J. Raman Spectroscopy of Amorphous, Nanostructures, Diamond-like Carbon, and Nanodiamond. Philosophical Transactions of the Royal Society A 362 2004: pp. 2477-2512.
    • (2004) Philosophical Transactions of the Royal Society A , vol.362 , pp. 2477-2512
    • Ferrari, A.C.1    Robertson, J.2
  • 57
    • 31544458442 scopus 로고    scopus 로고
    • Friction, Wear and Material Transfer of Sintered Polyimides Sliding against Various Steel and Diamond-like Carbon Coated Surfaces
    • Samyn, P., Schoukens, G., Quintelier, J., De Baets, P. Friction, Wear and Material Transfer of Sintered Polyimides Sliding against Various Steel and Diamond-like Carbon Coated Surfaces. Tribology International 39 2006: pp. 575-589.
    • (2006) Tribology International , vol.39 , pp. 575-589
    • Samyn, P.1    Schoukens, G.2    Quintelier, J.3    de Baets, P.4
  • 61
    • 37249080735 scopus 로고    scopus 로고
    • Optical Absorption Parameters of Amorphous Carbon Films from Forouhi-Bloomer and Tauc-Lorentz Models: A Comparative Study
    • Laidani, N., Bartali, R., Gottardi, G., Anderle, M., Cheyssac, P. Optical Absorption Parameters of Amorphous Carbon Films from Forouhi-Bloomer and Tauc-Lorentz Models: a Comparative Study. Journal of Physics: Condensed Matter 20 2008: pp. 015216 (8 p.).
    • (2008) Journal of Physics: Condensed Matter , vol.20 , pp. 015216
    • Laidani, N.1    Bartali, R.2    Gottardi, G.3    Anderle, M.4    Cheyssac, P.5
  • 62
    • 0037308551 scopus 로고    scopus 로고
    • Optical and Electronic Properties of Amorphous Carbon Materials
    • Logothetidis, S. Optical and Electronic Properties of Amorphous Carbon Materials. Diamond & Related Materials 12 2003: pp. 141-150. http://dx.doi.org/10.1016/S0925-9635(03)00015-3
    • (2003) Diamond & Related Materials , vol.12 , pp. 141-150
    • Logothetidis, S.1
  • 65
    • 0035507851 scopus 로고    scopus 로고
    • From Tribological Coatings to Low-k Dielectrics for ULSI Interconnects
    • Grill, A. From Tribological Coatings to Low-k Dielectrics for ULSI Interconnects. Thin Solid Films 398-399 2001: pp. 527-532.
    • (2001) Thin Solid Films , vol.398-399 , pp. 527-532
    • Grill, A.1
  • 67
    • 0036792894 scopus 로고    scopus 로고
    • Space-charge-limited Current in Hydrogenated Amorphous Carbon Films Containing Silicon and Oxygen
    • Bozhko, A., Shupegin, M., Takagi, T., Space-charge-limited Current in Hydrogenated Amorphous Carbon Films Containing Silicon and Oxygen. Diamond and Related Materials 11 2002: pp. 1753-1759.
    • (2002) Diamond and Related Materials , vol.11 , pp. 1753-1759
    • Bozhko, A.1    Shupegin, M.2    Takagi, T.3
  • 68
    • 21544477786 scopus 로고    scopus 로고
    • Determination of the Thermal Conductivity of Diamond-like Nanocomposite films Using a Scanning Thermal Microscope
    • Ruiz, F., Sun, W. D., Pollak, F. H., Venkatramanl, C. Determination of the Thermal Conductivity of Diamond-like Nanocomposite films Using a Scanning Thermal Microscope. Applied Physics Letters 73 1998: pp.1802-1804.
    • (1998) Applied Physics Letters , vol.73 , pp. 1802-1804
    • Ruiz, F.1    Sun, W.D.2    Pollak, F.H.3    Venkatramanl, C.4
  • 71
    • 0034188599 scopus 로고    scopus 로고
    • Thermal Conduction in Metalized Tetrahedral Amorphous Carbon (ta-C) Films on Silicon
    • Chen, G., Hui, P., Xu, S. Thermal Conduction in Metalized Tetrahedral Amorphous Carbon (ta-C) Films on Silicon. Thin Solid Films 366 2000: pp. 95-99. http://dx.doi.org/10.1016/S0040-6090(99)01097-4
    • (2000) Thin Solid Films , vol.366 , pp. 95-99
    • Chen, G.1    Hui, P.2    Xu, S.3
  • 72
    • 33846804147 scopus 로고    scopus 로고
    • Wetting Behaviours of a-C:H:Si:O Film Coated Nano- scale Dual Rough Surface
    • Kim, T.-Y., Ingmar, B., Bewilogua, K., Oh, K. H., Lee, K.-R. Wetting Behaviours of a-C:H:Si:O Film Coated Nano- scale Dual Rough Surface. Chemical Physics Letters 436 2007: pp. 199-203. http://dx.doi.org/10.1016/j.cplett.2007.01.036
    • (2007) Chemical Physics Letters , vol.436 , pp. 199-203
    • Kim, T.-Y.1    Ingmar, B.2    Bewilogua, K.3    Oh, K.H.4    Lee, K.-R.5
  • 73
    • 50349084643 scopus 로고    scopus 로고
    • Influence of Ar Gas Flow Rate in Organosilicon Plasma for the Fabrication of SiO:CH Thin Films by PECVD Method
    • Yun, Y., Yoshida, T., Shimazu, N., Nanba, N., Inoue, Y., Saito, N., Takai, O. Influence of Ar Gas Flow Rate in Organosilicon Plasma for the Fabrication of SiO:CH Thin Films by PECVD Method. Surface & Coatings Technology 202 2008: pp. 5259-5261. http://dx.doi.org/10.1016/j.surfcoat.2008.06.004
    • (2008) Surface & Coatings Technology , vol.202 , pp. 5259-5261
    • Yun, Y.1    Yoshida, T.2    Shimazu, N.3    Nanba, N.4    Inoue, Y.5    Saito, N.6    Takai, O.7


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.