Dielectric properties of the ion beam deposited SiOx doped DLC films

Medziagotyra

Volumn 15, Issue 1, 2009, Pages 3-6

  Meškinis, Šarunas ^a   Gudaitis, Rimas ^a   Tamulevičius, Sigitas ^a   Kopustinskas, Vitoldas ^a   Andrulevičius, Mindaugas ^a  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

Author keywords

Dielectric properties; Doped diamond like carbon films; Ion beam synthesis; Siox

Indexed keywords

EID: 77952145049     PISSN: 13921320     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (21)

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