Effect of SiOx-incorporation hydrocarbons on the tribological properties of DLC films

Diamond and Related Materials

Volumn 10, Issue 3-7, 2001, Pages 1058-1062

  Chen, Liang Yih ^a   Chau Nan Hong, Franklin ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Adhesion; Diamond like carbon films; Hexamethysiloxane reactants

Indexed keywords

ADHESION; HYDROCARBONS; INDUCTIVELY COUPLED PLASMA; MICROSTRUCTURE; RAMAN SCATTERING; SILICON COMPOUNDS; STEEL; X RAY PHOTOELECTRON SPECTROSCOPY;

STEEL SUBSTRATES;

DIAMOND LIKE CARBON FILMS;

ADHESION; DIAMOND-LIKE CARBON; HYDROCARBON; INORGANIC COATING; SILICON DIOXIDE; TRIBOLOGY;

EID: 0037851425     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(00)00573-2     Document Type: Article

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