Ion beam energy effects on structure and properties of SiOx doped diamond-like carbon films

Surface and Coatings Technology

Volumn 202, Issue 11, 2008, Pages 2328-2331

  Meskinis S ^a,b   Gudaitis, R ^a   Slapikas K ^a   Tamulevicius S ^a,b   Andrulevicius M ^a   Guobiene, A ^a,b   Puiso J ^a,b   Niaura, G ^c  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

^b KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

^c CENTER FOR PHYSICAL SCIENCES AND TECHNOLOGY   (Lithuania)

Author keywords

AFM; Contact angle with water; Ion energy; Raman scattering spectra; SiOx doped diamond like carbon; XPS

Indexed keywords

CONTACT ANGLE; ION BEAMS; RAMAN SCATTERING; REFRACTIVE INDEX; SILICON COMPOUNDS; STRUCTURE (COMPOSITION); SYNTHESIS (CHEMICAL);

HEXAMETHYLDISILOXANE; ION ENERGY;

DIAMOND LIKE CARBON FILMS;

CONTACT ANGLE; DIAMOND LIKE CARBON FILMS; ION BEAMS; RAMAN SCATTERING; REFRACTIVE INDEX; SILICON COMPOUNDS; STRUCTURE (COMPOSITION); SYNTHESIS (CHEMICAL);

EID: 38949099063     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.08.035     Document Type: Article

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