Structural and tribological properties of diamond-like nanocomposite thin films

Surface and Coatings Technology

Volumn 206, Issue 2-3, 2011, Pages 228-233

  Santra, T S ^a   Bhattacharyya, T K ^b   Patel, P ^c   Tseng, F G ^a   Barik, T K ^d  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b INDIAN INSTITUTE OF TECHNOLOGY   (India)

^c University of Illinois at Urbana Champaign   (United States)

^d HALDIA INSTITUTE OF TECHNOLOGY   (India)

Author keywords

Diamond like nanocomposite; Friction; Rf PECVD

Indexed keywords

DEPOSITED FILMS; DIAMOND-LIKE; DIAMOND-LIKE NANOCOMPOSITE; FILM STRUCTURE; FRICTION COEFFICIENTS; FTIR; FTIR ANALYSIS; GAS PRECURSORS; GRAPHITIC STRUCTURES; NANOCOMPOSITE THIN FILMS; NANOPARTICLE SIZES; PYREX GLASS; RADIO FREQUENCY PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITIONS; RF-PECVD; SCRATCH TEST; SILAZANES; SILICON SUBSTRATES; TRIBOLOGICAL PROPERTIES;

AMORPHOUS CARBON; AMORPHOUS FILMS; ATOMIC FORCE MICROSCOPY; CARBON FILMS; CHEMICAL VAPOR DEPOSITION; DEPOSITION; DIAMONDS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; FRICTION; HIGH RESOLUTION ELECTRON MICROSCOPY; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; KURCHATOVIUM; NANOCOMPOSITES; NANOINDENTATION; PHOTOELECTRON SPECTROSCOPY; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SCATTERING; RAMAN SPECTROSCOPY; SILICON; STRUCTURAL PROPERTIES; SURFACE ROUGHNESS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; TRIBOLOGY; X RAY PHOTOELECTRON SPECTROSCOPY;

NANOCOMPOSITE FILMS;

EID: 80052349970     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2011.06.057     Document Type: Article

References (37)

1. Riuz F., Sun W.D., Pollak F.H., Venkatraman C. Appl. Phys. Lett. 1998, 73:1802.
2. Lifshitz Y. Diamond Relat. Mater. 1999, 8:1659.
3. Bhushan B. Diamond Relat. Mater. 1999, 8:1985.
4. Shirakura A., Nakaya M., Koga Y., Kodama H., Hasebe T., Suzuki T. Thin Solid Films 2006, 494:84.
5. Liu D., Benstetter G., Lodermeier E. Thin Solid Films 2003, 436:244.
6. Morshed M.M., McNamara B.P., Cameron D.C., Hashmi M.S.J. Surf. Coat. Technol. 2003, 163-164:541.
7. Tillmann W., Vogli E., Hoffmann F. Thin Solid Films 2007, 516:262.
8. Siegal M.P., Barbour J.C., Provencia P.N., Tallant D.R., Friedmann T.A. Appl. Phys. Lett. 1998, 73:759.
9. Siegal M.P., Tallant D.R., Provencia P.N., Overmyer D.L., Simpson R.L., Martinez-Miranda L.J. Appl. Phys. Lett. 2000, 76:3052.
10. Chen L.Y., Hong F.C.N. Appl. Phys. Lett. 2003, 82:3526.
11. Neerinck D., Persoone P., Sercu M., Goel A., Venkatraman C., Kester D., Halter C., Swab P., Bray D. Thin Solid Films 1998, 317:402.
12. Yang W.J., Choa Y.H., Sekino T., Shim K.B., Niihara K., Auh K.H. Thin Solid Films 2003, 434:49.
13. Tallant D.R., Parmeter J.E., Siegal M.P., Simpson R.L. Daimond Relat. Mater. 1995, 4:191.
14. Davis C.A. Thin Solid Films 1993, 226:30.
15. Robertson J. Diamond Relat. Mater. 1993, 2:984.
16. Venkatraman C., Kester D.J., Goel A., Bray D.J. Miner. Met. Mater. Soc. 1995, 21.
17. Yang W.J., Choa Y.H., Sekino T., Shim K.B., Niihara K., Auh K.H. Mater. Lett. 2003, 57:3305.
18. Das T., Ghosh D., Bhattacharyya T.K., Maiti T.K. J. Mater. Sci.: Mater. Med. 2007, 18:493.
19. Santra T.S., Liu C.H., Bhattacharyya T.K., Patel P., Barik T.K. J. Appl. Phys. 2010, 107:124320-1.
20. Paishin V., Meletis E.I., Ves S., Logothetidis S. Thin Solid Films 1995, 270:165.
21. Dorfman V.F., Pypkin B.N. Surf. Coat. Technol. 1991, 48:193.
22. V.F. Dorfman, B.N. Pypkin, U.S. Patent, Patent Number: 5,352, (1994) 493.
23. Robertson J. Pure Appl. Chem. 1994, 66:1789.
24. Marchon B., Heiman N., Khan M.R., Lautie A., Ager J.W., Veris D.K. J. Appl. Phys. 1991, 69:5748.
25. Dillion R.O., Woollam J.A. Phys. Rev. B. 1984, 29:3482.
26. Wu J., Chen C., Shin C., Li M., Leu M., Li A. Thin Solid Films 2008, 517:1141.
27. Contarrini S., Lambers E., Holloway P.H. Appl. Surf. Sci. 1992, 62:181.
28. Verpoort F., Bossuyt A.R., Verdonck L. J. Electron. Spectrosc. Relat. Phenom. 1996, 82:151.
29. Leung T.Y., Man W.F., Lim P.K., Chan W.C., Gaspari F., Zukotynski S. J. Non-Cryst Solids 1999, 254:156.
30. Cuomo J.J., Doyle J.P., Bruley J. Appl. Phys. Lett. 1991, 58:466.
31. Yan X.B., Xu T., Yang S.R., Liu H.W., Xue Q.J. J. Phys. D: Appl. Phys. 2004, 37:2416.
32. Benndorf C., Hadenfeldt S., Luithardt W. Diamond Relat. Mater. 1996, 5:784.
33. Palshin V., Meletis E.I., Ves S., Logothetidis S. Thin Solid Films 1995, 270:165.
34. Skoog D.A., Holler F.J., Nieman T.A. Principles of Instrumental Analysis 1998, Harcourt Brace & Company, Philadelphia. forth ed.
35. Nadler M.P., Donovan T.M., Green A.K. Thin Solid Films 1984, 116:241.
36. Coatings Tribology-Properties, Techniques and Applications in Surface Engineering 1994, 93. Elsevier, Amsterdam. K. Holmberg, A. Matthews, D. Dowson (Eds.).
37. Dekempeneer E., Acker K.V., Vercammen K., Meneve J., Neerinck D., Eufinger S., Pappaert W., Sercu M., Smeets J. Surf. Coat. Technol. 2001, 142-144:669.