XPS and XRR studies on microstructures and interfaces of DLC films deposited by FCVA method

Thin Solid Films

Volumn 420-421, Issue , 2002, Pages 235-240

  Park, C K ^a   Chang, S M ^a   Uhm, H S ^a   Seo, S H ^a   Park, Jin ^a  

^a Hanyang University   (South Korea)

Author keywords

Diamond like carbon; Filtered cathodic vacuum arc; X ray photoelectron spectroscopy; X ray reflectivity

Indexed keywords

CATHODES; DEPOSITION; INTERFACES (MATERIALS); MICROSTRUCTURE; RAMAN SPECTROSCOPY; VACUUM APPLICATIONS; X RAY PHOTOELECTRON SPECTROSCOPY;

FILTERED CATHODIC VACUUM ARC;

DIAMOND LIKE CARBON FILMS;

EID: 0037011081     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00750-2     Document Type: Conference Paper

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