Microstructure and tribological properties of SiOx/DLC films grown by PECVD

Surface and Coatings Technology

Volumn 194, Issue 1, 2005, Pages 128-135

  Yang, Won Jae ^a   Sekino, Tohru ^b   Shim, Kwang Bo ^a   Niihara, Koichi ^b   Auh, Keun Ho ^a  

^a Hanyang University   (South Korea)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

Amorphous materials; Friction coefficient; Hardness; SiOx DLC

Indexed keywords

ADDITION REACTIONS; DIAMOND LIKE CARBON FILMS; ELECTRIC POTENTIAL; FOURIER TRANSFORM INFRARED SPECTROSCOPY; FRICTION; MICROSTRUCTURE; RAMAN SPECTROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; TRIBOLOGY; X RAY PHOTOELECTRON SPECTROSCOPY;

AMORPHOUS HYDROCARBONS; AMORPHOUS SILICA; BIAS VOLTAGES; RAMAN SPECTROMETERS;

SILICA;

COATING; FILM; FRICTION; HARDNESS; MICROSTRUCTURE; TRIBOLOGY;

EID: 13744259466     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2004.05.023     Document Type: Article

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