SiOx-doped DLC films: Charge transport, dielectric properties and structure

Vacuum

Volumn 82, Issue 6, 2008, Pages 617-622

  Meskinis S ^a   Slapikas K ^a   Gudaitis, R ^a   Tamulevicius S ^a   Kopustinskas, V ^a   Guobiene, A ^a   Niaura, G ^b  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

^b CENTER FOR PHYSICAL SCIENCES AND TECHNOLOGY   (Lithuania)

Author keywords

AFM; Charge transport mechanisms; Dielectric properties; Raman scattering spectra; SiOx doped DLC films

Indexed keywords

CARRIER TRANSPORT; CHARGE TRANSFER; DIAMOND LIKE CARBON FILMS; OXIDE FILMS; RAMAN SCATTERING;

CARRIER TRANSPORT MECHANISM; ELECTRODE METAL; METAL INTERLAYERS;

SILICA;

EID: 38849111879     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2007.09.007     Document Type: Article

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