Ion beam assisted deposition of diamond-like nanocomposite films in an acetylene atmosphere

Thin Solid Films

Volumn 346, Issue 1, 1999, Pages 82-85

  Ding, Xing zhao ^d   Zhang, Fu min ^a   Liu, Xiang Huai ^a   Wang, P W ^b   Durrer, W G ^b   Cheung, W Y ^c   Wong, S P ^c   Wilson, I H ^c  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b UNIVERSITY OF TEXAS AT EL PASO   (United States)

^c CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

^d NONE

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; DEPOSITION; DIAMOND FILMS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; ION BEAMS; RAMAN SPECTROSCOPY; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SYNTHESIS (CHEMICAL); THERMODYNAMIC STABILITY; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

DIAMOND LIKE CARBON FILMS; ION BEAM ASSISTED DEPOSITION; NANOCOMPOSITE FILMS;

NANOSTRUCTURED MATERIALS;

EID: 0033149508     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01087-6     Document Type: Article

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