A study of HMDSO/O 2 plasma deposits using a high-sensitivity and -energy resolution XPS instrument: Curve fitting of the Si 2p core level

Applied Surface Science

Volumn 137, Issue 1-3, 1999, Pages 179-183

  Alexander, M R ^a,c   Short, R D ^a   Jones, F R ^a   Michaeli, W ^d   Blomfield, C J ^b  

^a UNIVERSITY OF SHEFFIELD   (United Kingdom)

^b Kratos Analytical Ltd   (United Kingdom)

^c UNIVERSITY OF MANCHESTER   (United Kingdom)

^d NONE

Author keywords

Curve fitting; HMDSO; Plasma; XPS

Indexed keywords

BINDING ENERGY; CHEMICAL BONDS; CURVE FITTING; MICROWAVES; OXYGEN; PLASMA SPRAYING; SILICON COMPOUNDS; X RAY PHOTOELECTRON SPECTROSCOPY;

HEXAMETHYLDISILOXANE; PLASMA DEPOSITED COATINGS;

SPRAYED COATINGS;

EID: 0032761517     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(98)00479-6     Document Type: Article

References (7)

1. R. d'Agostino (Ed.), Plasma Deposition, Treatment, and Etching of Polymers, Academic Press, 1990.
2. A.P. Kettle, F.R. Jones, M.R. Alexander, R.D. Short, W. Wu, I. Verpoest, M. Stollenwerk, Composites Part A 29 (1998) 241.
3. M.R. Alexander, R.D. Short, F.R. Jones, Plasmas and Polymers 2 (1997) 227.
4. M.R. Alexander, R.D. Short, F.R. Jones, J. Phys. Chem. B. 101 (1997) 3614.
5. M.R. Alexander, R.D. Short, F.R. Jones, W. Michaeli, M. Stollenwerk, G. Mathar, J. Zabold, The heterogeneous nature of hexamethyldisiloxane (HMDSO) plasma deposits, Ceramic Films and Coatings, British Ceramic Proceedings No. 54, Institute of Materials, 1995, p. 87.
6. M.R. Alexander, R.D. Short, F.R. Jones, M. Stollenwerk, J. Zabold, W. Michaeli, J. Mater. Sci. 31 (1996) 1879.
7. G. Beamson, D. Briggs (Eds.), High Resolution XPS of Organic Polymers - The Scienta ESCA300 Database, Wiley, 1992, p. 72.