Synthesis of the silicon and silicon oxide doped a-C:H films from hexamethyldisiloxane vapor by DC ion beam

Surface and Coatings Technology

Volumn 200, Issue 22-23 SPEC. ISS., 2006, Pages 6240-6244

  Kopustinskas, V ^a   Meškinis, Š ^a   Tamulevicius S ^a,b   Andrulevicius M ^a   Ciziute B ^b   Niaura, G ^c  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

^b KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

^c CENTER FOR PHYSICAL SCIENCES AND TECHNOLOGY   (Lithuania)

Author keywords

a C:H; Diamond like carbon; Hexamethyldisiloxane; Ion beam deposition; SiOx doping

Indexed keywords

AMORPHOUS FILMS; DIAMOND LIKE CARBON FILMS; DOPING (ADDITIVES); HYDROGENATION; ION BEAM ASSISTED DEPOSITION; RAMAN SCATTERING; REFRACTIVE INDEX; SILICON; SILICON COMPOUNDS;

HEXAMETHYLDISILOXANE; OPTICAL TRANSPARENCY; SILICON OXIDE;

SYNTHESIS (CHEMICAL);

AMORPHOUS FILMS; DIAMOND LIKE CARBON FILMS; DOPING (ADDITIVES); HYDROGENATION; ION BEAM ASSISTED DEPOSITION; RAMAN SCATTERING; REFRACTIVE INDEX; SILICON; SILICON COMPOUNDS; SYNTHESIS (CHEMICAL);

EID: 33748165693     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.11.101     Document Type: Article

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