Ion beam energy effects on structure and properties of diamond like carbon films deposited by closed drift ion source

Vacuum

Volumn 84, Issue 9, 2010, Pages 1133-1137

  Meškinis, Š ^a   Kopustinskas, V ^a   Tamuleviciene A ^a   Tamulevicius S ^a   Niaura, G ^b   Jankauskas, J ^a   Gudaitis, R ^a  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

^b CENTER FOR PHYSICAL SCIENCES AND TECHNOLOGY   (Lithuania)

Author keywords

Closed drift (anode layer) ion source; Diamond like carbon; Electrical properties; Ion beam deposition; Optical properties; Structure

Indexed keywords

ANODE LAYERS; CLOSED DRIFT (ANODE LAYER) ION SOURCE; DIAMOND LIKE CARBON; ELECTRICAL PROPERTY; ION BEAM DEPOSITION;

ACETYLENE; BEAM PLASMA INTERACTIONS; CARBON FILMS; CHEMICAL MODIFICATION; DIAMONDS; ELECTRIC PROPERTIES; ION BEAMS; ION BOMBARDMENT; ION SOURCES; IONS; LIGHTING; OPTICAL PROPERTIES; STRUCTURAL PROPERTIES;

DIAMOND LIKE CARBON FILMS;

EID: 77950022232     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2010.01.047     Document Type: Article

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