Micromachining of diamond-like carbon deposited by closed drift ion source for cantilevers and membranes

Medziagotyra

Volumn 15, Issue 3, 2009, Pages 201-206

  Meškinis, Šarunas ^a   Tamulevičius, Sigitas ^a   Kopustinskas, Vitoldas ^a   Gudonyte, Angele ^a   Grigaliunas, Viktoras ^a   Jankauskas, Jurgis ^a   Gudaitis, Rimas ^a  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

Author keywords

Diamond like carbon; Free standing films; Ion beam deposition; Surface micromashining

Indexed keywords

EID: 70350402172     PISSN: 13921320     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (34)

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