Characterisation of a-C:H and oxygen-containing Si:C:H films by Raman spectroscopy and XPS

Diamond and Related Materials

Volumn 14, Issue 3-7, 2005, Pages 1051-1056

  Veres, M ^a   Koos M ^a   Toth S ^a   Fule M ^a   Pocsik I ^a   Toth A ^b   Mohai, M ^b   Bertoti I ^b  

^a WIGNER RESEARCH CENTRE FOR PHYSICS   (Hungary)

^b CHEMICAL RESEARCH CENTER   (Hungary)

Author keywords

Bonding configurations; Diamond like carbon; Silicon carbide (SiC); Vibrational properties

Indexed keywords

COMPOSITION; MOLECULAR VIBRATIONS; OXYGEN; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY; SILICON CARBIDE; SILICON WAFERS; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

BONDING CONFIGURATIONS; ENERGY RESOLUTIONS; TETRAMETHYLSILANE; VIBRATIONAL PROPERTIES;

DIAMOND LIKE CARBON FILMS;

EID: 18444404377     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2005.01.020     Document Type: Conference Paper

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