Application of diamond-like nanocomposite tribological coatings on LIGA microsystem parts

Journal of Microelectromechanical Systems

Volumn 18, Issue 3, 2009, Pages 695-704

  Prasad, Somuri V ^a   Scharf, Thomas W ^a,b   Kotula, Paul G ^a   Michael, Joseph R ^a   Christenson, Todd R ^a,c  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b UNIVERSITY OF NORTH TEXAS   (United States)

^c HT Micro   (United States)

Author keywords

Coatings; Electron microscopy; Friction; friction; Metals; Nickel; Silicon; Substrates; Surface treatment

Indexed keywords

ABFORMUNG; CHARACTERIZATION TECHNIQUES; COATING COVERAGE; COATING INTERFACES; CROSS SECTION; DIAMOND-LIKE; DRY NITROGEN; ELECTRON BACK SCATTER DIFFRACTION; FOCUSED ION BEAM MICROSCOPY; FRICTION AND WEAR; FRICTION MECHANISM; FRICTION TEST; FRICTION TESTERS; GALVANOFORMUNG; INTERFACIAL SHEAR; LITHOGRAPHIE; LOW-FRICTION BEHAVIOR; METAL-METAL CONTACTS; MICRO SYSTEMS TECHNOLOGIES; NI ALLOYS; RELATIVE HUMIDITIES; SLIDING CONTACTS; SURFACE COATINGS; TEST STRUCTURE; TRIBOLOGICAL COATINGS;

ATMOSPHERIC HUMIDITY; COATINGS; DIAMONDS; ELECTROFORMING; ELECTRON MICROSCOPES; ELECTRONS; ENVIRONMENTAL CHAMBERS; FRICTION; IMAGE ANALYSIS; METALS; MICROSYSTEMS; NANOCOMPOSITES; NICKEL; NICKEL ALLOYS; OSCILLATORS (ELECTRONIC); SILICON ALLOYS; SURFACE TREATMENT; TESTING; TRANSMISSION ELECTRON MICROSCOPY; TRIBOLOGY;

SUBSTRATES;

EID: 67549124804     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2016284     Document Type: Article

References (25)

1. T. R. Christenson, "X-ray based fabrication," in MEMS Handbook, G.-E.-H. Mohammed, Ed. Boca Raton, FL: CRC Press, 2001.
2. J. Hruby, "LIGA technologies and applications," MRS Bull., vol. 26, pp. 337-340, 2001.
3. S. V. Prasad, M. T. Dugger, T. R. Christenson, and D. R. Tallant, "LIGA microsystems: Surface interactions, tribology, and coatings," J. Manuf. Process., vol. 6, no. 1, pp. 107-116, 2004.
4. T.W. Scharf and S. V. Prasad, "Diamond-like nanocomposite coatings for LIGA nickel alloy parts," Sandia Nat. Lab., Albuquerque, NM, p. 1004, Rep. SAND2005-1004, 2005.
5. W. J. Meng, L. S. Stephens, and K. W. Kelly, "LIGA-based micromechanical systems and ceramic nanocomposite surface coatings," in Nano-Tribology: Critical Assessment and Research Needs, S. M. Hsu and Z. C. Ying, Eds. Norwell, MA: Kluwer, 2003.
6. D. Kim, D. Cao, M. D. Bryant, W. Meng, and F. F. Ling, "Tribological study of microbearings for MEMS applications," J. Tribol., vol. 127, no. 3, pp. 537-547, Jul. 2005.
7. D. M. Cao, W. J. Meng, S. J. Simke, G. L. Doll, T. Wang, and K. W. Kellog, "Conformal deposition of Ti-C:H coatings over high-aspect ratio microscale structures and tribological characteristics," Thin Solid Films, vol. 429, no. 1/2, pp. 46-54, Apr. 2003.
8. 14 films for microelectromechanical devices," Appl. Phys. Lett., vol. 83, no. 14, pp. 2781-2783, Oct. 2003.
9. R. F. Bunshah, Handbook of Hard Coatings: Deposition Technologies, Properties and Applications, R.F. Bunshah, Ed. Park Ridge, NJ: Noyes, 2001, pp. 66-69.
10. V. F. Dorfman, "Diamond-like nanocomposites (DLN)," Thin Solid Films, vol. 212, no. 1/2, pp. 267-273, May 1992.
11. C. Venkatraman, D. J. Kester, A. Goel, and D. J. Bray, "Diamond like nanocomposite coatings - A new class of materials," in Surface Modifications Technologies IX, T. Sudarshan, W. Reitz, and J. J. Stiglich, Eds. Warrendale, PA: The Minerals, Metals and Materials Society, 1996.
12. A. Hall, M. T. Dugger, S. V. Prasad, and T. Christenson, "Sidewall morphology of electroformed LIGA parts - Implications for friction, adhesion and wear control," J. Microelectromech. Syst., vol. 14, no. 2, pp. 326-334, Apr. 2005.
13. S. V. Prasad, J. R. Michael, and T. R. Christenson, "EBSD studies on wear-induced subsurface regions in LIGA nickel," Scr. Mater., vol. 48, no. 3, pp. 255-260, Feb. 2003.
14. T. E. Buchheit, D. A. LaVan, J. R. Michael, T. R. Christenson, and S. D. Leith, "Microstructural and mechanical properties investigation of electrode posited and annealed LIGA nickel structures," Metall. Mater. Trans. A, vol. 33, no. 3, pp. 539-554, 2002.
15. S. J. Goods, J. J. Kelly, and N. Yang, Microsyst. Technol., vol. 10, p. 498, 2004.
16. M. R. Keenan and P. G. Kotula, "Apparatus and system for multivariate spectral analysis," U.S. Patent 6 584 413, Jun. 24, 2003.
17. P. G. Kotula, M. R. Keenan, and J. R. Michael, "Automated analysis of EDS spectral images in the SEM: A powerful new microanalysis technique," Microsc. Microanal., vol. 9, pp. 1-17, 2003.
18. D. J. Kester, C. L. Brodbeck, I. L. Singer, and A. Kyriakopoulos, "Sliding wear behavior of diamond-like nanocomposite coatings," Surf. Coat. Technol., vol. 113, no. 3, pp. 268-273, Mar. 1999.
19. T. W. Scharf, J. A. Ohlausen, D. R. Tallant, and S. V. Prasad, "Mechanisms of friction in diamond-like nanocomposite coatings," J. Appl. Phys., vol. 101, no. 6, pp. 063 521-1-063 521-11, Mar. 2007.
20. T. W. Scharf and I. L. Singer, "Role of third bodies in friction behavior of diamond-like nanocomposite coatings studied by in situ tribometry," Tribol. Trans., vol. 45, no. 3, pp. 363-371, 2002.
21. T. W. Scharf and I. L. Singer, "Monitoring transfer films and friction instabilities with in situ raman tribometry," Tribol. Lett., vol. 14, no. 1, pp. 3-8, Jan. 2003.
22. I. L. Singer, "Solid lubrication processes," in Fundamentals of Friction: Macroscopic and Microscopic Processes. Dordrecht, The Netherlands: Kluwer, 1992, pp. 237-261.
23. D. Bowden and F. P. Tabor, The Friction and Lubrication of Solids. Oxford, U.K.: Clarendon, 1986.
24. J. J. Jungk, J. R. Michael, and S. V. Prasad, "The role of substrate plasticity on the tribological behavior of diamond-like nanocomposite coatings," Acta Mater., vol. 56, no. 9, pp. 1956-1966, May 2008.
25. A. D. Romig, M. T. Dugger, and P. J. McWhorter, "Materials issues in microelectromechanical devices: Science, engineering, manufacturability and reliability," Acta Mater., vol. 51, no. 19, pp. 5837-5866, Nov. 2003.