Optical properties of the undoped and SiOx doped DLC films

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6596, Issue , 2007, Pages

  Meškinis, Šarunas ^a   Kopustinskas, Vitoldas ^a   Šlapikas, Kȩstutis ^a   Gudaitis, Rimas ^a   Tamulevičius, Sigitas ^a   Niaura, Gediminas ^b   Rinnerbauer, Veronika ^c   Hingerl, Kurt ^c  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

^b CENTER FOR PHYSICAL SCIENCES AND TECHNOLOGY   (Lithuania)

^c JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

Author keywords

Diamond like carbon; Direct ion beam deposition; Raman spectroscopy; SiOx doped hydrogenated amorphous carbon films; Spectroscopic ellipsometry

Indexed keywords

CURRENT DENSITY; DOPING (ADDITIVES); GAS MIXTURES; HYDROGEN; RAMAN SCATTERING; SPECTROSCOPIC ELLIPSOMETRY;

DIRECT ION BEAM DEPOSITION; GAS PRECURSORS; SIOX DOPED HYDROGENATED AMORPHOUS CARBON FILMS;

DIAMOND LIKE CARBON FILMS;

EID: 34249022625     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.726556     Document Type: Conference Paper

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