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3rd International Conference - Radiation Interaction with Material and Its Use in Technologies 2010, Program and Materials, Interaction'2010

Volumn , Issue , 2010, Pages 169-172

Deposition of SiOx containing DLC films using different transport gas in a closed drift ion beam source

(4) Tamulevičiene, Asta a Kopustinskas, Vitoldas a Meškinis, Šarunas a Tamulevičius, Sigitas a

a KAUNAS UNIVERSITY OF TECHNOLOGY (Lithuania)

Author keywords

Optical properties; Siox doped diamond like carbon; Transport gas

Indexed keywords

BAND GAPS; CRYSTALLINE SILICONS; DIAMOND LIKE CARBON; DLC FILM; HEXAMETHYL DISILOXANE; ION BEAM DEPOSITION; ION BEAM SOURCE; OPTICAL PARAMETER; REFLECTIVE PROPERTIES; SIOX DOPED DIAMOND LIKE CARBON; THICKNESS DETERMINATION; TRANSPORT GAS; WAVELENGTH RANGES;

CHEMICAL MODIFICATION; DIAMONDS; GASES; HELIUM; ION BEAMS; QUARTZ; REFRACTIVE INDEX; SILICON COMPOUNDS; SILICON OXIDES;

OPTICAL FILMS;

EID: 79952435685 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (1)

References (7)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.