SCOPUS 정보 검색 플랫폼

Volumn 12, Issue 9, 2003, Pages 1532-1538

Optical properties of diamond-like carbon films containing SiOx

Author keywords

Density of states; Diamond like carbon; Ellipsometry; Silicon

Indexed keywords

AMORPHOUS MATERIALS; CHEMICAL VAPOR DEPOSITION; ELLIPSOMETRY; IMPURITIES; OPTICAL PROPERTIES; OXYGEN; SILICON; SILICON COMPOUNDS;

ELECTRONIC STATES;

DIAMOND LIKE CARBON FILMS;

DIAMOND-LIKE CARBON;

EID: 0142247030 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(03)00221-8 Document Type: Article

Times cited : (31)

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