Piezoelectric aluminum nitride thin fi lms for microelectromechanical systems

MRS Bulletin

Volumn 37, Issue 11, 2012, Pages 1051-1061

  Piazza, Gianluca ^a   Felmetsger, Valeriy ^b   Muralt, Paul ^c   Olsson III, Roy H ^d   Ruby, Richard ^e  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b OEM Group   (United States)

^c SWISS FEDERAL INSTITUTE OF TECHNOLOGY   (Switzerland)

^d SANDIA NATIONAL LABORATORIES   (United States)

^e BROADCOM CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALN; COMPATIBLE MATERIALS; DUPLEXERS; INDUSTRIAL STANDARDS; MATERIAL DEVELOPMENT; NARROW BANDS; POSSIBLE FUTURES; RADIO FREQUENCY (RF) SIGNAL PROCESSING; RESEARCH EFFORTS; RESONANT DEVICE;

ALUMINUM NITRIDE; ELECTROMECHANICAL DEVICES; MEMS; MICROMECHANICS; OSCILLATORS (ELECTRONIC); SIGNAL PROCESSING;

PIEZOELECTRICITY;

EID: 84869008228     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/mrs.2012.268     Document Type: Review

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