Structural and electroacoustic studies of AlN thin films during low temperature radio frequency sputter deposition

Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 5, 2001, Pages 2664-2669

  Engelmark, F ^a   Iriarte, G F ^a   Katardjiev, I V ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE FILTERS; ATOMIC FORCE MICROSCOPY; ELECTROACOUSTIC TESTING; HIGH TEMPERATURE EFFECTS; MAGNETRON SPUTTERING; PIEZOELECTRIC MATERIALS; PRESSURE EFFECTS; SPUTTER DEPOSITION; SURFACE ROUGHNESS; TEXTURES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

PHASE VELOCITY;

ALUMINUM NITRIDE;

EID: 0035442525     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1399320     Document Type: Article

References (20)