Post-CMOS-compatible aluminum nitride resonant MEMS accelerometers

Journal of Microelectromechanical Systems

Volumn 18, Issue 3, 2009, Pages 671-678

  Olsson III, Roy H ^a   Wojciechowski, Kenneth E ^a   Baker, Michael S ^a   Tuck, Melanie R ^a   Fleming, James G ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Acceleration; Acceleration measurement; Accelerometers; Acoustic devices; Acoustic oscillators; Acoustic resonators; Acoustic transducers; Beams; CMOS integrated circuits; Electrodes; Oscillators; Phase noise; Resonant frequency

Indexed keywords

ALN; ALN LAYERS; AMPLIFIER NOISE; BEAMS; LINEAR DRIVES; MAXIMUM POWER; MEASUREMENT SETUP; MEMS ACCELEROMETER; OSCILLATOR PHASE NOISE; OSCILLATORS; PIEZOELECTRIC COUPLINGS; POST-CMOS; PROOF MASS; QUALITY FACTORS; READOUT ELECTRONICS; RESONANT ACCELEROMETER; RESONANT FREQUENCIES; RESONANT FREQUENCY; SENSOR RESOLUTION; THEORETICAL CALCULATIONS; TUNING-FORK; UP-CONVERSION; UPPER LIMITS;

ACCELERATION; ACCELERATION MEASUREMENT; ACCELEROMETERS; ACOUSTIC RESONATORS; ACOUSTICS; ALUMINA; ALUMINUM; ALUMINUM NITRIDE; CMOS INTEGRATED CIRCUITS; ELECTRODES; INTEGRATED CIRCUITS; LUMPED PARAMETER NETWORKS; MOS CAPACITORS; NATURAL FREQUENCIES; NITRIDES; OSCILLATORS (ELECTRONIC); PHASE NOISE; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; RESONATORS;

ACOUSTIC TRANSDUCERS;

EID: 67549130169     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2020374     Document Type: Article

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