Reconfigurable CMOS oscillator based on multifrequency AlN contour-mode MEMS resonators

IEEE Transactions on Electron Devices

Volumn 58, Issue 5, 2011, Pages 1281-1286

  Rinaldi, Matteo ^a   Zuo, Chengjie ^a   Van Der Spiegel, Jan ^a   Piazza, Gianluca ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

AlN contour mode resonator (CMR); complementary metaloxidesemiconductor (CMOS) microelectromechanical system (MEMS) oscillator; microelectromechanical systems (MEMSs); piezoelectric resonator; reconfigurable oscillator

Indexed keywords

CONTOUR-MODE RESONATORS; MICRO ELECTRO MECHANICAL SYSTEM; MICROELECTROMECHANICAL SYSTEMS; PIEZOELECTRIC RESONATORS; RE-CONFIGURABLE;

COMPOSITE MICROMECHANICS; CRYSTAL RESONATORS; JITTER; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRICITY;

OSCILLATORS (ELECTRONIC);

EID: 79955540480     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2011.2104961     Document Type: Article

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