Enhancement of piezoelectric response in scandium aluminum nitride alloy thin films prepared by dual reactive cosputtering

Advanced Materials

Volumn 21, Issue 5, 2009, Pages 593-596

  Akiyama, Morito ^a   Kamohara, Toshihiro ^a   Kano, Kazuhiko ^b   Teshigahara, Akihiko ^b   Takeuchi, Yukihiro ^b   Kawahara, Nobuaki ^b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b DENSO CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALLOYS; ALUMINA; ALUMINUM; ALUMINUM COMPOUNDS; ALUMINUM NITRIDE; CRYSTAL ORIENTATION; CRYSTAL STRUCTURE; LIGHT METALS; METALLIC COMPOUNDS; NITRIDES; PHASE DIAGRAMS; PHASE TRANSITIONS; PIEZOELECTRICITY; SCANDIUM; SOLIDS; SPUTTER DEPOSITION; THIN FILMS; X RAY ANALYSIS;

ALN; CO-SPUTTERING; CO-SPUTTERING METHODS; COMBINED EFFECTS; LOW-SUBSTRATE TEMPERATURES; NITRIDE ALLOYS; NON EQUILIBRIUMS; PIEZOELECTRIC COEFFICIENTS; PIEZOELECTRIC RESPONSE; REACTIVE CO-SPUTTERING; STRUCTURE AND ORIENTATIONS; X-RAY DIFFRACTIONS;

FILM PREPARATION;

EID: 60349106915     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/adma.200802611     Document Type: Article

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