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Volumn 86, Issue 15, 2005, Pages 1-3
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Lateral-field-excited thin-film Lamb wave resonator
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Author keywords
[No Author keywords available]
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Indexed keywords
ACOUSTIC SURFACE WAVE DEVICES;
ALUMINUM NITRIDE;
BANDPASS FILTERS;
INTEGRATED CIRCUITS;
NATURAL FREQUENCIES;
OSCILLATORS (ELECTRONIC);
SENSORS;
THIN FILMS;
ACOUSTIC WAVELENGTH;
HIGH-FREQUENCY ELECTROACOUSTIC DEVICES;
PARTICLE DISPLACEMENTS;
THIN PLATES;
RESONATORS;
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EID: 20844432503
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1900312 Document Type: Article |
Times cited : (91)
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References (8)
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