In-plane acoustic reflectors for reducing effective anchor loss in lateral-extensional MEMS resonators

Journal of Micromechanics and Microengineering

Volumn 21, Issue 8, 2011, Pages

  Harrington, B P ^a   Abdolvand, R ^a  

^a OKLAHOMA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANCHOR LOSS; FINITE ELEMENT; IN-PLANE; MEASURED RESULTS; MEMS RESONATORS; MICROMACHINED; Q ENHANCEMENT; QUALITY FACTORS; RESONATOR DESIGN; SIMULATED DATA; SPECIFIC DESIGN;

BANDPASS FILTERS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; REFLECTION; RESONATORS;

ACOUSTIC RESONATORS;

EID: 80051506030     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/8/085021     Document Type: Article

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