Integration of high-Q BAW resonators and filters above IC

Digest of Technical Papers - IEEE International Solid-State Circuits Conference

Volumn 48, Issue , 2005, Pages

  Dubois, Marc Alexandre ^a   Billard, Christophe ^b   Muller, Claude ^a   Parat, Guy ^b   Vincent, Pierre ^b  

^a CSEM   (Switzerland)

^b CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 27644540445     PISSN: 01936530     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. K.M. Lakin, "Thin Film Resonators and Filters," Proc. IEEE Ultrasonics Symposium, vol. 2, pp. 895-906, Oct., 1999.
2. R. Ruby et al., "Ultra-Miniature High-Q Filters and Duplexers Using FBAR Technology," ISSCC Dig. of Tech. Papers, pp. 120-121, Feb., 2001.
3. R. Aigner et al., "Bulk-Acoustic-Wave Filters: Performance Optimization and Volume Manufacturing," IMS, June, 2003.
4. M.-A. Dubois and P. Muralt, "Stress and Piezoelectric Properties of Aluminium Nitride Thin Films Deposited on Metal Electrodes by Pulsed Direct Current Reactive Sputtering," J. of Appl. Phys., vol. 89, no. 11, pp. 6389-6395, June, 2001.
5. F. Martin et al., "Thickness Dependence of the Properties of Highly C-Axis Textured AlN Thin Films," J. Vac. Sci. Tech. A, vol. 22, no. 2, pp. 361-365, Mar., 2004.