Ovenized and thermally tunable aluminum nitride microresonators

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2010, Pages 974-978

  Kim, Bongsang ^a   Olsson, Roy H ^a   Wojciechowski, Kenneth E ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

aluminum nitride resonator; frequency tuning; oven based tuning; ovenization; thermal model

Indexed keywords

ALN; ALN FILMS; BULK MATERIALS; CROSS SECTIONAL AREA; FREQUENCY SHIFT; FREQUENCY-TUNING; HIGH THERMAL; IN-VACUUM; LOCALIZED HEATING; LOW POWER; MICRO RESONATORS; OVEN-BASED TUNING; OVENIZATION; POLYCRYSTALLINE ALUMINUM; POWER EFFICIENT; TEMPERATURE INCREASE; THERMAL MODEL;

ALUMINUM; ALUMINUM COATINGS; COMMUNICATION SYSTEMS; FILMS; NITRIDES; RESONATORS; THERMAL CONDUCTIVITY; ULTRASONICS;

ALUMINUM NITRIDE;

EID: 80054753575     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2010.5935635     Document Type: Conference Paper

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