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2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 1994-1997

High temperature compatible aluminum nitride resonating strain sensor

(6) Goericke, F T a Chan, M W a Vigevani, G a Izyumin, I b Boser, B E b Pisano, A P a

a UNIVERSITY OF CALIFORNIA (United States)

b UNIVERSITY OF CALIFORNIA (United States)

Author keywords

aluminum nitride; double ended tuning fork; high temperature; strain sensing

Indexed keywords

ALN; APPLIED STRAIN; DEVICE OPERATIONS; DOUBLE-ENDED TUNING FORKS; FABRICATION PROCESS; HARSH ENVIRONMENT; HIGH TEMPERATURE; MECHANICAL LOADS; MEMSDEVICES; PIEZO-ELECTRIC EFFECTS; RESONANCE FREQUENCY SHIFT; STRAIN SENSING; STRAIN SENSORS;

ALUMINUM; HIGH TEMPERATURE APPLICATIONS; MECHANICAL STABILITY; MICROSYSTEMS; NITRIDES; PIEZOELECTRIC ACTUATORS; PIEZOELECTRICITY; RESONANCE; SOLID-STATE SENSORS; TRANSDUCERS;

ALUMINUM NITRIDE;

EID: 80052114285 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: 10.1109/TRANSDUCERS.2011.5969198 Document Type: Conference Paper

Times cited : (17)

References (7)

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