Corrugated aluminum nitride energy harvesters for high energy conversion effectiveness

Journal of Micromechanics and Microengineering

Volumn 21, Issue 8, 2011, Pages

  Yen, Ting Ta ^a   Hirasawa, Taku ^a   Wright, Paul K ^a   Pisano, Albert P ^a   Lin, Liwei ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER STRUCTURES; COMMON PROBLEMS; CORRUGATED STRUCTURES; ENERGY HARVESTER; FABRICATION PROCESS; LOAD RESISTANCES; MICROMACHINING PROCESS; OUTPUT POWER; OUTPUT VOLTAGES; PIEZOELECTRIC CANTILEVERS; PIEZOELECTRIC LAYERS; RESONANCE FREQUENCIES; UNIMORPH;

ALUMINUM; ALUMINUM NITRIDE; ENERGY CONVERSION; HARVESTERS; HIGH ENERGY PHYSICS; MICROMACHINING; NANOCANTILEVERS; NITRIDES; PIEZOELECTRICITY; RESONANCE;

ENERGY HARVESTING;

EID: 79961213299     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/8/085037     Document Type: Article

References (19)

1. Roundy S and Wright P K 2004 A piezoelectric vibration based generator for wireless electronics Smart Mater. Struct. 13 1131-42
2. Platt S R, Farritor S and Haider H 2005 On low-frequency power generation with PZT ceramics IEEE/ASME Trans. Mechatronics 10 240-52 (Pubitemid 40679588)
3. Roundy S, Leland E S, Baker J, Carleton E, Reilly E, Lai E, Otis B, Rabaey J M, Wright P K and Sundararajan V 2005 Improving power output for vibration-based energy scavengers IEEE Pervasive Comput. 4 28-36 (Pubitemid 40495603)
4. Mateu L and Moll F 2005 Optimum piezoelectric bending beam structures for energy harvesting using shoe inserts J. Intell. Mater. Syst. Struct. 16 835-45 (Pubitemid 41498484)
5. Erturk A and Inman D J 2009 An experimentally validated bimorph cantilever model for piezoelectric energy harvesting from base excitations Smart Mater. Struct. 18 025009
6. Fang H-B, Liu J-Q, Xu Z-Y, Dong L, Wang L, Chen D, Cai B-C and Liu Y 2006 Fabrication and performance of MEMS-based piezoelectric power generator for vibration energy harvesting Microelectron. J. 37 1280-4 (Pubitemid 44767769)
7. Shen D, Park J-H, Ajitsaria J, Choe S-Y, Wikle H C III and Kim D-J 2008 The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting J. Micromech. Microeng. 18 055017
8. Kok S L, White N M and Harris N R 2008 A free-standing, thick-film piezoelectric energy harvester IEEE Sensors Conf. pp 589-92
9. Mathers A, Moon K S and Yi J 2009 A vibration-based PMN-PT energy harvester IEEE Sensors J. 9 731-9
10. Jeon Y B, Sood R, Jeong J-H and Kim S-G 2005 MEMS power generator with transverse mode thin film PZT Sensors Actuators A 122 16-22 (Pubitemid 41037282)
11. Knight R R, Mo C and Clark W W 2009 Development and testing of a MEMS piezoelectric energy harvester Proc. SPIE 7288 72880A-1
12. Elfrink R, Kamel T M, Goedbloed M, Matova S, Hohlfeld D, van Andel Y and van Schaijk R 2009 Vibration energy harvesting with aluminum nitride-based piezoelectric devices J. Micromech. Microeng. 19 094005
13. Lu M-P, Song J, Lu M-Y, Chen M-T, Gao Y, Chen L-J and Wang Z L 2009 Piezoelectric nanogenerator using p type ZnO nanowire arrays Nano Lett. 9 1223-7
14. Li S, Yuan J and Lipson H 2011 Ambient wind energy harvesting using cross-flow fluttering J. Appl. Phys. 109 026104
15. Chang C, Tran V H, Wang J, Fuh Y-K and Lin L 2010 Direct-write piezoelectric polymeric nanogenerator with high energy conversion efficiency Nanoletters 10 726-31
16. 3 thin films and their piezoelectric applications IEEE Trans. Ultrason. Ferroelectr. Freq. Control 54 2431-8
17. Lin C-M, Yen T-T, Felmetsger V V, Hopcroft M A, Kuypers J H and Pisano A P 2010 Thermally compensated aluminum nitride Lamb wave resonators for high temperature applications Appl. Phys. Lett. 97 083501
18. Yen T-T, Lin C-M, Hopcroft M A, Kuypers J H, Senesky D G and Pisano A P 2010 Synthesis of narrowband AlN Lamb wave ladder-type filters based on overhang adjustment IEEE International Ultrasonic Symposium 970-3
19. Mitcheson P D, Reilly E K, Toh T, Wright P K and Yeatman E M 2007 Performance limits of the three MEMS inertial energy generator transudation types J. Micromech. Microeng. 17 S211-6