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Vacuum

Volumn 86, Issue 1, 2011, Pages 23-26

Aluminum scandium nitride thin-film bulk acoustic resonators for wide band applications

(4) Moreira, Milena a Bjurström, Johan a Katardjev, Ilia a Yantchev, Ventsislav a

a UPPSALA UNIVERSITY (Sweden)

Author keywords

Acoustic microwave devices; Composite thin films; Thin film devices

Indexed keywords

ACOUSTIC MICROWAVES; COMPOSITE THIN FILMS; CONCENTRATION RANGES; ELECTRO-ACOUSTIC; RADIO FREQUENCIES; RELATIVE CONCENTRATION; RF APPLICATIONS; THIN-FILM BULK ACOUSTIC WAVE RESONATOR; WIDE-BAND; WIDEBAND APPLICATIONS;

COMPOSITE FILMS; ELECTROMECHANICAL COUPLING; ELECTROMECHANICAL DEVICES; MICROWAVE ACOUSTICS; MICROWAVE DEVICES; NITRIDES; RESONATORS; SCANDIUM; THIN FILM DEVICES; THIN FILMS;

ACOUSTIC RESONATORS;

EID: 79960188837 PISSN: 0042207X EISSN: None Source Type: Journal
DOI: 10.1016/j.vacuum.2011.03.026 Document Type: Article

Times cited : (224)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.