Modeling and characterization of cantilever-based MEMS piezoelectric sensors and actuators

Journal of Microelectromechanical Systems

Volumn 21, Issue 2, 2012, Pages 406-413

  Littrell, Robert ^a,b   Grosh, Karl ^a,b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b Baker Calling Inc   (United States)

Author keywords

Accelerometer; cantilever; energy harvesting; microphone; piezoelectric; smallpiezoelectric coupling

Indexed keywords

ALN; ALN LAYERS; CANTILEVER; CLOSED-FORM EXPRESSION; DISPLACEMENT PROFILES; EXPERIMENTAL TECHNIQUES; PIEZOELECTRIC; PIEZOELECTRIC COEFFICIENT; PIEZOELECTRIC COUPLINGS; PIEZOELECTRIC LAYERS; PIEZOELECTRIC SENSORS AND ACTUATORS; PRESSURE EXCITATION; SENSING AND ACTUATING;

ACCELEROMETERS; ALUMINUM NITRIDE; ELECTROMECHANICAL DEVICES; ENERGY HARVESTING; MEMS; MICROPHONES; PIEZOELECTRICITY;

NANOCANTILEVERS;

EID: 84859705538     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2174419     Document Type: Article

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