Very high frequency channel-select MEMS filters based on self-coupled piezoelectric AlN contour-mode resonators

Sensors and Actuators, A: Physical

Volumn 160, Issue 1-2, 2010, Pages 132-140

  Zuo, Chengjie ^a   Sinha, Nipun ^a   Piazza, Gianluca ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

Aluminum nitride (aln); Channel select filters; Contour mode resonators; Microelectromechanical systems (mems); Piezoelectric filters; Self coupling

Indexed keywords

ALUMINUM; ALUMINUM NITRIDE; BANDPASS FILTERS; CRYSTAL FILTERS; ELECTROMECHANICAL DEVICES; MEMS; NITRIDES; PIEZOELECTRICITY; RESONATORS;

ALUMINUM NITRIDE (ALN); CHANNEL-SELECT FILTER; CONTOUR-MODE RESONATORS; MICRO ELECTROMECHANICAL SYSTEM (MEMS); SELF-COUPLINGS;

ELECTROMECHANICAL FILTERS;

EID: 77954244562     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2010.04.011     Document Type: Article

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