Dual-beam actuation of piezoelectric AlN RF MEMS switches monolithically integrated with AlN contour-mode resonators

Journal of Micromechanics and Microengineering

Volumn 18, Issue 10, 2008, Pages

  Mahameed, Rashed ^a   Sinha, Nipun ^a   Pisani, Marcelo B ^a   Piazza, Gianluca ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ALUMINUM COMPOUNDS; ELECTRIC CONVERTERS; ELECTRIC SWITCHES; MEMS; MICROELECTROMECHANICAL DEVICES; MONOLITHIC INTEGRATED CIRCUITS; NITRIDES; PIEZOELECTRICITY; RESONATORS;

ALUMINUM NITRIDES; BEAM SWITCHES; COMPATIBLE PROCESSES; DEPOSITED FILMS; FAST SWITCHING; LOW ACTUATION VOLTAGES; MODE RESONATORS; MONOLITHICALLY INTEGRATED; MULTI FREQUENCIES; RF FRONT-ENDS; RF-MEMS; S PARAMETERS;

SWITCHES;

EID: 58149340159     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/10/105011     Document Type: Article

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