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Applied Physics Letters

Volumn 97, Issue 11, 2010, Pages

Increased electromechanical coupling in w-Scx Al1-x N

(6) Wingqvist, Gunilla a Tasnádi, Ferenc a Zukauskaite, Agne a Birch, Jens a Arwin, Hans a Hultman, Lars a

a LINKÖPING UNIVERSITY (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ALN; DENSITY FUNCTIONS; DIELECTRIC CONSTANTS; ELECTRO-ACOUSTIC DEVICES; ELLIPSOMETRY MEASUREMENTS; HIGH FREQUENCY; LOW DIELECTRIC LOSS; MATERIAL CHOICE; REACTIVE MAGNETRON SPUTTERING; WIRELESS COMMUNICATIONS;

DIELECTRIC LOSSES; ELECTROMECHANICAL COUPLING; ELECTROMECHANICAL DEVICES; PROBABILITY DENSITY FUNCTION; SCANDIUM; THIN FILMS; WIRELESS TELECOMMUNICATION SYSTEMS;

ALUMINUM;

EID: 77956799314 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3489939 Document Type: Article

Times cited : (177)

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