Integrated aluminum nitride piezoelectric microelectromechanical system for radio front ends

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 27, Issue 4, 2009, Pages 776-784

  Piazza, Gianluca ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALN; DEVICE OPERATIONS; FABRICATION ASPECTS; FRONT END; LARGE SCALE INTEGRATION; MEMS RESONATORS; MEMS TECHNOLOGY; MICRO ELECTRO MECHANICAL SYSTEM; MICROELECTROMECHANICAL SYSTEMS; MULTIBAND; NEXT-GENERATION WIRELESS COMMUNICATIONS; RADIO FREQUENCIES; RE-CONFIGURABLE; RF TRANSCEIVERS; RF-MEMS; SILICON CHIP; TECHNOLOGICAL DEVELOPMENT;

ALUMINA; ALUMINUM; ALUMINUM NITRIDE; COMPOSITE MICROMECHANICS; MECHATRONICS; MEMS; NITRIDES; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; RESONATORS; SPACE OPTICS; SWITCHES; TECHNOLOGICAL FORECASTING;

MICROELECTROMECHANICAL DEVICES;

EID: 67650330585     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3077276     Document Type: Article

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