Single-chip multiple-frequency ALN MEMS filters based on contour-mode piezoelectric resonators

Journal of Microelectromechanical Systems

Volumn 16, Issue 2, 2007, Pages 319-328

  Piazza, Gianluca ^a   Stephanou, Philip J ^b   Pisano, Albert P ^b  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Aluminum nitride (AlN); Contour mode resonators; Ladder filters; Microelectromechanical systems (MEMS) filters; Microelectromechanical systems (MEMS) resonators; Piezoelectric resonators

Indexed keywords

ALUMINUM COMPOUNDS; BANDPASS FILTERS; INSERTION LOSSES; LADDER NETWORKS; PIEZOELECTRIC DEVICES; RESONATORS;

ALUMINUM NITRIDE; MEMS FILTERS; MEMS RESONATORS; MULTIPLE FREQUENCY FILTER; PIEZOELECTRIC RESONATOR;

MEMS;

EID: 34147142470     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.889503     Document Type: Article

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