Super-high-frequency two-port AlN contour-mode resonators for RF applications

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 57, Issue 1, 2010, Pages 38-45

  Rinaldi, Matteo ^a   Zuniga, Chiara ^a   Zuo, Chengjie ^a   Piazza, Gianluca ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

2-PORT RESONATORS; ALN; ALN FILMS; CONTOUR-MODE RESONATORS; EXPERIMENTAL VERIFICATION; HIGH FREQUENCY HF; MEMS FILTER; MICRO-ELECTRO-MECHANICAL; NANOFEATURES; NARROW BANDS; RF APPLICATIONS; ULTRA-THIN; VERTICAL DIMENSIONS;

ELECTROMECHANICAL FILTERS; MEMS; MICROELECTROMECHANICAL DEVICES;

RESONATORS;

ACOUSTICS; ARTICLE; ARTIFICIAL MEMBRANE; COMPUTER AIDED DESIGN; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; MICROELECTROMECHANICAL SYSTEM; RADIOFREQUENCY RADIATION; REPRODUCIBILITY; SENSITIVITY AND SPECIFICITY; TRANSDUCER; VIBRATION;

ACOUSTICS; COMPUTER-AIDED DESIGN; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MEMBRANES, ARTIFICIAL; MICRO-ELECTRICAL-MECHANICAL SYSTEMS; RADIO WAVES; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY; TRANSDUCERS; VIBRATION;

EID: 73649099180     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2010.1376     Document Type: Conference Paper

References (16)

1. C. T.-C. Nguyen, "MEMS technology for timing and frequency control," IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol.54, no.2, pp. 251-270, Feb. 2007.
2. D. Weinstein and S. A. Bhave, "Internal dielectric transduction of a 4.5 GHz silicon bar resonator," in IEEE Int. Electron Devices Meeting, Dec. 2007, pp. 415-418.
3. G. Piazza, P. J. Stephanou, and A. P. Pisano, "Piezoelectric aluminum nitride vibrating contour-mode MEMS resonators," J. Microelectromech. Syst., vol.15, no.6, pp. 1406-1418, Dec. 2006. (Pubitemid 44921759)
4. R. Abdolvand, G. K. Ho, J. Butler, and F. Ayazi, "ZnO-on- nanocrystalline- diamond lateral bulk acoustic resonators," in Proc. 20th IEEE Int. Conf. Micro Electro Mechanical Systems, Kobe, Japan, Jan. 2007, pp. 795-798.
5. P. J. Stephanou, J. P. Black, and A. L. Benjamin, "Miniaturized multi-band filter banks for extravehicular radio (EVA) applications," in Proc. IEEE Radio Frequency Integrated Circuits Symp., Atlanta, GA, Jun. 2008, pp. 171-174.
6. D. L. DeVoe, "Piezoelectric thin film micromechanical beam resonators," Sens. Actuators A, vol.88, pp. 263-272, 2001.
7. M. Hara, T. Yokoyama, M. Ueda, and Y. Satoh, "X-Band filters utilizing AlN thin film bulk acoustic resonators," in Proc. IEEE Ultrasonic Symp., New York, NY, Oct. 2007, pp. 1152-1155.
8. K. M. Lakin, "Thin film resonators and filters," in Proc. IEEE Ultrasonic Symp., Nevada, USA, Oct. 1999, vol.2, pp. 895-906.
9. Introduce to Saw filter. ITF, Bucheon, Korea. [Online] Available: http://www.itf.co.kr/tech/sub3.htm
10. Fortiming Corporation, Marlborough, MA. [Online] Available: http://www.4timing.com/qcm.htm
11. C. Zuo, N. Sinha, M. B. Pisani, C. R. Perez, R. Mahameed, and G. Piazza, "Channel-select RF MEMS filters based on self-coupled AlN contour-mode piezoelectric resonators," in Proc. IEEE Ultrasonics Symp., New York, NY, Oct. 2007, pp. 1156-1159.
12. M. Rinaldi, C. Zuniga, and G. Piazza, "5-10 GHz AlN contourmode nanoelectromechanical resonators," in 22nd IEEE Int. Conf. Micro Electro Mechanical Systems, Sorrento, Italy, Jan. 2009, pp. 916-919.
13. P. J. Stephanou, G. Piazza, C. D. White, M. B. J. Wijesundara, and A. P. Pisano, "Piezoelectric thin film AlN annular dual contour mode bandpass filter," in Proc. ASME IMECE 2005, 2005, IMECE05-81679.
14. K. M. Lakin, "Modeling of thin film resonators and filters," in Proc. IEEE MTT-S Int. Microwave Symp. Dig., Jun. 1992, pp. 149-152.
15. G. Piazza, P. J. Stephanou, and A. P. Pisano, "Single-chip multiplefrequency AlN MEMS filters based on contour-mode piezoelectric resonators," J. Microelectromech. Syst., vol.16, no.2, pp. 319-328, Apr. 2007.
16. V. Kaajakari, T. Mattila, A. Lipsanen, and A. Oja, "Nonlinear mechanical effects in silicon longitudinal mode beam resonators," Sens. Actuators A, vol.120, pp. 64-70, 2004.